公开(公告)号：US20110193952A1

公开(公告)日：2011-08-11

申请号：US13018817

申请日：2011-02-01

申请人： Akira KOZAKAI ,  Masataka Toda ,  Koji Kuno

发明人： Akira KOZAKAI ,  Masataka Toda ,  Koji Kuno

IPC分类号： G06K9/00 ,  H04N7/18

CPC分类号： G01N21/8851 ,  G01N21/474 ,  G01N21/8806 ,  G01N21/95 ,  G01N2021/8918

摘要： A defect detection apparatus, detecting a defect on an inspection surface of an inspection object, includes a table including a table surface, a lighting device emitting a light to the inspection surface, an image capturing device capturing an image of the inspection surface, a displacement mechanism changing a direction of at least of one of a relative direction of an optical axis of the lighting device relative to the table surface and a relative direction of an optical axis of the image capturing device relative to the table surface, an image data obtaining portion obtaining an image data from images captured by the image capturing device while changing the relative direction, a feature extracting portion extracting a feature representing a reflection characteristic of the inspection surface from the image data, and a defect specification portion specifying a type of the defect on the inspection surface based on the extracted feature.

摘要翻译： 一种检测检查对象的检查面上的缺陷的缺陷检测装置，包括：台面，向检查面发射光的照明装置，摄像检查面的图像的摄像装置，位移 改变照明装置的光轴相对于台面的相对方向和摄像装置相对于台面的相对方向中的至少一个的方向的机构，图像数据取得部 在改变相对方向的同时从图像捕获装置拍摄的图像中获取图像数据，从图像数据中提取表示检查表面的反射特性的特征的特征提取部分，以及指定缺陷类型的缺陷指定部分 基于提取的特征的检查表面。