公开(公告)号：US20100200163A1

公开(公告)日：2010-08-12

申请号：US12668940

申请日：2008-07-03

申请人： Michael Puggi ,  Alexander Schwartzfurtner ,  Dieter Frank

发明人： Michael Puggi ,  Alexander Schwartzfurtner ,  Dieter Frank

IPC分类号： C23F1/08 ,  B08B13/00

CPC分类号： H01L21/67051

摘要： Disclosed is an apparatus for wet treatment of a disc-like article, which comprises: a spin chuck for holding and rotating the disc-like article, and an inner edge nozzle dispensing treatment liquid directed towards a first peripheral region of the first surface of the disc-like article, wherein the first surface is facing the spin chuck and the first peripheral region is defined as being a region of the first surface with an inner radius (ri), which is greater than 1 cm less than the disc-like article's radius (ra), wherein the inner edge nozzle is positioned in a stationary manner between the disc-like article (when placed on the spin chuck) and the spin chuck, wherein the inner edge nozzle is feed through a central pipe, which is disposed in a stationary manner and penetrates centrally through the spin chuck, for supplying a treatment liquid against a first surface of the disc-like article.

摘要翻译： 公开了一种用于湿处理盘状物品的设备，其包括：用于保持和旋转盘状物品的旋转卡盘，以及分配处理液体的内边缘喷嘴，该处理液朝向第一表面的第一表面的第一周边区域 盘状物品，其中第一表面面向旋转卡盘，并且第一周边区域被定义为第一表面的具有内半径（ri）的区域，其比盘状物品的尺寸大1cm 半径（ra），其中所述内边缘喷嘴以固定的方式定位在所述盘状制品（当放置在所述旋转卡盘上）和所述旋转卡盘之间时，所述内边缘喷嘴通过设置在所述旋转卡盘 以静止的方式穿过旋转卡盘中心地穿过，以将治疗液体提供给盘状物品的第一表面。

公开(公告)号：US08821681B2

公开(公告)日：2014-09-02

申请号：US12668940

申请日：2008-07-03

申请人： Michael Puggl ,  Alexander Schwartzfurtner ,  Dieter Frank

发明人： Michael Puggl ,  Alexander Schwartzfurtner ,  Dieter Frank

IPC分类号： B08B3/02 ,  C23F1/08 ,  B08B13/00

CPC分类号： H01L21/67051

摘要： Disclosed is an apparatus for wet treatment of a disc-like article, which comprises: a spin chuck for holding and rotating the disc-like article, and an inner edge nozzle dispensing treatment liquid directed towards a first peripheral region of the first surface of the disc-like article, wherein the first surface is facing the spin chuck and the first peripheral region is defined as being a region of the first surface with an inner radius (ri), which is greater than 1 cm less than the disc-like article's radius (ra), wherein the inner edge nozzle is positioned in a stationary manner between the disc-like article (when placed on the spin chuck) and the spin chuck, wherein the inner edge nozzle is feed through a central pipe, which is disposed in a stationary manner and penetrates centrally through the spin chuck, for supplying a treatment liquid against a first surface of the disc-like article.

摘要翻译： 公开了一种用于湿处理盘状物品的设备，其包括：用于保持和旋转盘状物品的旋转卡盘，以及分配处理液体的内边缘喷嘴，该处理液朝向第一表面的第一表面的第一周边区域 盘状物品，其中第一表面面向旋转卡盘，并且第一周边区域被定义为第一表面的具有内半径（ri）的区域，其比盘状物品的尺寸大1cm 半径（ra），其中所述内边缘喷嘴以固定的方式定位在所述盘状制品（当放置在所述旋转卡盘上）和所述旋转卡盘之间时，所述内边缘喷嘴通过设置在所述旋转卡盘 以静止的方式穿过旋转卡盘中心地穿过，以将治疗液体提供给盘状物品的第一表面。