PROJECTION OBJECTIVE WITH DIAPHRAGMS
    1.
    发明申请
    PROJECTION OBJECTIVE WITH DIAPHRAGMS 有权
    投影目标与石墨片

    公开(公告)号:US20110285979A1

    公开(公告)日:2011-11-24

    申请号:US13107011

    申请日:2011-05-13

    IPC分类号: G03B27/72 G02B17/08 G02B27/18

    CPC分类号: G03F7/70941 G02B27/0043

    摘要: A projection objective for imaging an object arranged in an object plane of the projection objective into an image of the object lying in an image plane of the projection objective has a multiplicity of transparent optical elements and holding devices for holding the optical elements at prescribable positions along an imaging beam path of the projection objective. Each of the optical elements has an optical useful region lying in the imaging beam path and an edge region lying outside the optical useful region. At least one holding element of the holding device assigned to the optical element acts at the edge region in the region of a contact zone. At least one of the optical elements is assigned a diaphragm arrangement with a false light diaphragm arranged directly upstream of the optical element and a second false light diaphragm arranged directly downstream of the optical element. Each of the false light diaphragms is fashioned in such a way that the false light diaphragm screens at least a part of the edge region against radiation running outside the imaging beam path.

    摘要翻译: 用于将布置在投影物镜的物平面中的物体成像为位于投影物镜的像平面中的物体的图像的投影物镜具有多个透明光学元件和用于将光学元件保持在规定位置的保持装置 投影物镜的成像光束路径。 每个光学元件具有位于成像光束路径中的光学有用区域和位于光学有用区域外部的边缘区域。 分配给光学元件的保持装置的至少一个保持元件作用在接触区域的边缘区域。 至少一个光学元件被分配有具有布置在光学元件的正上游的假光膜的膜片装置和直接布置在光学元件的下游的第二假光膜。 每个假光隔膜以这样的方式形成,使得假光隔膜将至少一部分边缘区域屏蔽到抵抗在成像光束路径外部运行的辐射。

    Sealing strip
    10.
    发明授权
    Sealing strip 失效
    密封条

    公开(公告)号:US07320819B2

    公开(公告)日:2008-01-22

    申请号:US10808862

    申请日:2004-03-24

    申请人: Alexander Wolf

    发明人: Alexander Wolf

    IPC分类号: B32B33/00

    摘要: A sealing strip is intended to seal a gap between two parts which are movable relative to each other. The sealing strip has a surface which is intended to adhere to one of the two parts and which has an adhesive layer. Before it is adhered to the one part, the adhesive layer is covered with a cover sheet. In order to make it easier to remove the cover sheet from the adhesive layer a pull-thread is provided which passes through the cover sheet and has at least one free end that protrudes from the sealing strip.

    摘要翻译: 密封条旨在密封可相对于彼此移动的两个部件之间的间隙。 密封条具有旨在粘附到两个部分之一并且具有粘合剂层的表面。 在粘合到一个部分之前,粘合剂层被覆盖片覆盖。 为了使粘合剂层更容易去除覆盖片,提供穿过覆盖片的拉线,并且具有从密封条突出的至少一个自由端。