公开(公告)号：US06177673B1

公开(公告)日：2001-01-23

申请号：US09208592

申请日：1998-12-10

申请人： Martti Juhani Blomberg ,  Altti Kaleva Torkkeli ,  Ari Lehto

发明人： Martti Juhani Blomberg ,  Altti Kaleva Torkkeli ,  Ari Lehto

IPC分类号： G01J502

CPC分类号： G02B5/22

摘要： The invention relates to a structure suitable for manufacturing by the fabrication techniques of micro-electronics so as to include an optically black surface that functions as an absorber or emitter, respectively, over a predetermined wavelength range, the structure includes a electrically nonconducting support layer (1), a metallic mirror layer (2) made on the support layer (1), and a lossy layer (4) made on the support layer (1) and the metallic mirror layer (2) superimposed thereon. According to the invention, the mirror layer (2) is made on the upper surface of the support layer (1) and the lossy layer (4) is made from a doped semiconductor material. The thickness of the multilayer structure (3, 4, 7) and the doping of the lossy layer (4) are predetermined relative to each other so that the mirror layer (2) will be optically matched over the predetermined wavelength range of absorption or emission, respectively, to the medium surrounding the structure. The invention also concerns a method for manufacturing the surfaces.

摘要翻译： 本发明涉及一种适用于通过微电子制造技术制造的结构，以便包括在预定波长范围上分别用作吸收体或发射体的光学黑色表面，该结构包括电非导电支撑层（ 1），在支撑层（1）上制成的金属镜层（2）和在支撑层（1）和金属镜层（2）上叠加的有损耗层（4）。 根据本发明，镜面层（2）制成在支撑层（1）的上表面上，有损层（4）由掺杂的半导体材料制成。 多层结构（3,4,7）的厚度和有损层（4）的掺杂是相对于彼此预定的，使得镜层（2）将在预定的吸收或发射波长范围内光学匹配 分别到围绕结构的介质。 本发明还涉及用于制造表面的方法。