Optically black surface for producing the same
    1.
    发明授权
    Optically black surface for producing the same 有权
    光学黑色表面生产相同

    公开(公告)号:US06177673B1

    公开(公告)日:2001-01-23

    申请号:US09208592

    申请日:1998-12-10

    IPC分类号: G01J502

    CPC分类号: G02B5/22

    摘要: The invention relates to a structure suitable for manufacturing by the fabrication techniques of micro-electronics so as to include an optically black surface that functions as an absorber or emitter, respectively, over a predetermined wavelength range, the structure includes a electrically nonconducting support layer (1), a metallic mirror layer (2) made on the support layer (1), and a lossy layer (4) made on the support layer (1) and the metallic mirror layer (2) superimposed thereon. According to the invention, the mirror layer (2) is made on the upper surface of the support layer (1) and the lossy layer (4) is made from a doped semiconductor material. The thickness of the multilayer structure (3, 4, 7) and the doping of the lossy layer (4) are predetermined relative to each other so that the mirror layer (2) will be optically matched over the predetermined wavelength range of absorption or emission, respectively, to the medium surrounding the structure. The invention also concerns a method for manufacturing the surfaces.

    摘要翻译: 本发明涉及一种适用于通过微电子制造技术制造的结构,以便包括在预定波长范围上分别用作吸收体或发射体的光学黑色表面,该结构包括电非导电支撑层( 1),在支撑层(1)上制成的金属镜层(2)和在支撑层(1)和金属镜层(2)上叠加的有损耗层(4)。 根据本发明,镜面层(2)制成在支撑层(1)的上表面上,有损层(4)由掺杂的半导体材料制成。 多层结构(3,4,7)的厚度和有损层(4)的掺杂是相对于彼此预定的,使得镜层(2)将在预定的吸收或发射波长范围内光学匹配 分别到围绕结构的介质。 本发明还涉及用于制造表面的方法。

    Overpressure protector
    2.
    发明授权
    Overpressure protector 失效
    超压保护器

    公开(公告)号:US5934307A

    公开(公告)日:1999-08-10

    申请号:US913666

    申请日:1997-12-17

    IPC分类号: F16K17/16 F16K37/00 F16K17/40

    摘要: The invention relates to an overpressure protector comprising a body portion (1) of single crystal silicon, a burst flow conduit (2) extending through the body portion (1), and a membrane (3) covering the burst flow conduit (2) and responding to a pressure difference. The membrane is a thin film (3), which is arranged to break when the pressure difference acting across it exceeds a predetermined value, and comprises a belt (6) whose electrical conductivity differs from that of the other material of the membrane. The belt is connected to means (9) for supplying electric current either for detecting breaking or the belt or for bursting the membrane (3) intentionally by means of heating effect of electric current.

    摘要翻译: PCT No.PCT / FI96 / 00148 Sec。 371 1997年12月17日第 102(e)日期1997年12月17日PCT 1996年3月11日PCT公布。 出版物WO96 / 28677 日期1996年9月19日本发明涉及一种超压保护器,其包括单晶硅的主体部分(1),延伸穿过主体部分(1)的突发流动导管(2)和覆盖突发流 导管(2)并响应压力差。 膜是薄膜(3),其被布置为当跨过其的压力差超过预定值时断裂,并且包括其导电性不同于膜的其它材料的导电带(6)。 带子连接到用于提供电流的装置(9),用于检测断路或皮带,或者通过电流的加热效应有意地破裂膜(3)。

    Method and apparatus for measurement of dewpoint of gases
    3.
    发明授权
    Method and apparatus for measurement of dewpoint of gases 失效
    用于测量气体露点的方法和装置

    公开(公告)号:US5178462A

    公开(公告)日:1993-01-12

    申请号:US783120

    申请日:1991-10-28

    申请人: Ari Lehto

    发明人: Ari Lehto

    IPC分类号: G01N25/66

    CPC分类号: G01N25/66

    摘要: A method and an apparatus for measuring dewpoint of different kinds of gases, is based on cooling the measured gas, with the help of cold gas, down to the dewpoint and then detecting the generated mist by optical sensors. The cooling gas is routed to a measurement area (7) from outside the process and the cooling gas is brought to an appropriate temperature below the dewpoint of the measured gas before being conducted to the measurement area (7). Mist generated during the cooling of the measured gas is detected by illuminating the measurement area (7) by a light emitting source (8) and measuring the light (2) scattered from the mist or light (3) penetrating through the mist with the help of a photodetector (9). The temperature of the measurement area is continuously monitored with temperature sensors (10) so that when the mist is detected, the temperature of the measurement area (7) at that instant corresponds to the dewpoint temperature of the measured gas.

    摘要翻译: 用于测量不同种类气体的露点的方法和装置是基于在冷气的帮助下将测量的气体冷却到露点,然后通过光学传感器检测所产生的雾。 冷却气体从工艺外部被引导到测量区域(7),并且在被传导到测量区域(7)之前,将冷却气体置于低于测量气体露点的适当温度。 通过用发光源(8)照射测量区域(7)并测量从透过雾中的雾或光(3)散射的光(2),从而检测在测量气体的冷却过程中产生的雾。 的光检测器(9)。 使用温度传感器(10)连续地监测测量区域的温度,使得当检测到雾时,该时刻的测量区域(7)的温度对应于所测量的气体的露点温度。

    Electrically modulatable thermal radiant source with specific filament
    6.
    发明授权
    Electrically modulatable thermal radiant source with specific filament 失效
    具有特定细丝间距的电可调热辐射源

    公开(公告)号:US5827438A

    公开(公告)日:1998-10-27

    申请号:US754128

    申请日:1996-11-22

    摘要: The invention is related to an electrically modulatable thermal radiant source with a multilayer structure. The radiant source includes a substrate, a first insulating layer formed onto the substrate, a radiant surface layer formed onto the first insulating layer, a second insulating layer formed on the radiant surface layer, a first metallization (incandescent filament) layer formed on the second insulating layer, a third insulating layer formed on the first metallization layer, and a second metallization layer for contacting formed on the third insulating layer. According to the invention, very thin incandescent filaments are formed from the first metallization layer and surrounded by the other elements of the multilayer structure as a uniform, planar plate.

    摘要翻译: 本发明涉及具有多层结构的可电调制热辐射源。 辐射源包括基板,形成在基板上的第一绝缘层,形成在第一绝缘层上的辐射表面层,形成在辐射表面层上的第二绝缘层,形成在第二绝缘层上的第一金属化(白炽灯丝)层 绝缘层,形成在第一金属化层上的第三绝缘层和形成在第三绝缘层上的第二接触金属化层。 根据本发明,从第一金属化层形成非常薄的白炽灯丝,并被多层结构的其它元件围绕成均匀的平板。

    Miniaturized fabry-perot spectrometer for optical analysis
    7.
    发明授权
    Miniaturized fabry-perot spectrometer for optical analysis 失效
    用于光学分析的小型化fabry-perot光谱仪

    公开(公告)号:US5818586A

    公开(公告)日:1998-10-06

    申请号:US550804

    申请日:1995-10-31

    IPC分类号: G01N21/27 G01J3/26 G01B9/02

    摘要: A miniaturized spectrometer for gas concentration measurement includes a radiation source for admitting electromagnetic radiation onto the gas to be measured, a detector for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer placed in the path of the radiation prior to the detector, control electronics circuitry for controlling the radiation source, the interferometer and the detector. The radiation source, the detector, the interferometer and the control electronics are integrated in a miniaturized fashion onto a common, planar substrate and the radiation source is an electrically modulatable micromechanically manufactured thermal radiation emitter.

    摘要翻译: 用于气体浓度测量的小型化光谱仪包括用于将电磁辐射进入待测量的气体的辐射源,用于检测透射通过或从气体发射的辐射的检测器,放置在辐射路径中的电可调法布里 - 珀罗干涉仪 在检测器之前,用于控制辐射源的控制电子电路,干涉仪和检测器。 辐射源,检测器,干涉仪和控制电子器件以小型化方式集成到共同的平面基板上,并且辐射源是可电调制的微机械制造的热辐射发射器。

    Thermal radiant source with filament encapsulated in protective film
    8.
    发明授权
    Thermal radiant source with filament encapsulated in protective film 失效
    热辐射源,灯丝封装在保护膜中

    公开(公告)号:US5644676A

    公开(公告)日:1997-07-01

    申请号:US494636

    申请日:1995-06-23

    CPC分类号: H01K7/00 G01J5/522 H01K1/02

    摘要: An electrically modulatable radiant source includes an essentially planar substrate, a well or hole formed in the substrate, and at least one incandescent filament attached to the substrate. The incandescent filament is aligned with the well or hole and is formed of a metallic compound which readily oxidizes at an operating temperature of the incandescent filament. An oxidation resistant film encapsulates the incandescent filament to prevent the filament from oxidizing. Furthermore, contact pads are formed on the substrate at both ends of the incandescent filament for feeding electric current to the incandescent filament.

    摘要翻译: 电可调节辐射源包括基本上平面的基板,在基板中形成的阱或孔,以及附着到基板的至少一个白炽灯丝。 白炽丝与孔或孔对准,并由在白炽灯丝的工作温度下容易氧化的金属化合物形成。 耐氧化膜封装白炽灯丝以防止灯丝氧化。 此外,在白炽灯丝两端的基板上形成接触焊盘,以将电流馈送到白炽灯丝。

    Apparatus and method for measuring gas concentrations
    9.
    发明授权
    Apparatus and method for measuring gas concentrations 失效
    测量气体浓度的装置和方法

    公开(公告)号:US5160843A

    公开(公告)日:1992-11-03

    申请号:US731971

    申请日:1991-07-18

    申请人: Ari Lehto

    发明人: Ari Lehto

    IPC分类号: G01N9/24 G01J3/10 G01N21/35

    摘要: An apparatus and method measures the concentration of a gas. The apparatus comprises a radiation source (70) for emitting radiation onto the gas (79) to be measured, whereby the radiation source (70) is comprised of an anode (4) and a cathode (9), and as an emitting fill gas the same as the gas (79) to be measured; and a radiation detector (74) with which the radiation transmitted through the gas (79) to be measured can be detected. The cathode (9) functions as an electron emitter, and between the anode (4) and the cathode is connected such a low operating voltage that does not cause ionization or essential dissociation of the emitting gas. The design provides an approximate temperature tracking of the radiation source with the ambient temperature.

    Method and apparatus for measurement of dewpoint of gases
    10.
    发明授权
    Method and apparatus for measurement of dewpoint of gases 失效
    用于测量气体点的方法和装置

    公开(公告)号:US5080494A

    公开(公告)日:1992-01-14

    申请号:US701341

    申请日:1991-05-09

    申请人: Ari Lehto

    发明人: Ari Lehto

    IPC分类号: G01N21/49 G01N25/66

    CPC分类号: G01N25/66

    摘要: A method and an apparatus for measuring dewpoint of different kinds of gases is based upon cooling the measured gas by mixing it with a cold gas down to the dewpoint and then detecting the generated mist by optical sensors. The cooling gas is routed to a measurement area (7) from outside the process and the cooling gas is brought to an appropriate temperature below the dewpoint of the measured gas before being conducted to the measurement area (7) where it is mixed with the measured gas. Mist generated during the cooling of the measured gas is detected by illuminating the measurement area (7) by a light emitting source (8) and measuring the light (2) scattered from the mist or light (3) penetrating through the mist with the help of a photodetector (9).

    摘要翻译: 用于测量不同种类气体的露点的方法和装置是基于通过将测量气体与冷气体一起冷却至露点,然后通过光学传感器检测产生的雾来冷却测量的气体。 冷却气体从工艺外部被引导到测量区域(7),并且在将冷却气体传导到测量区域(7)之前,将冷却气体置于低于测量气体露点的适当温度,在测量区域 加油站。 通过用发光源(8)照射测量区域(7)并测量从透过雾中的雾或光(3)散射的光(2),从而检测在测量气体的冷却过程中产生的雾。 的光检测器(9)。