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公开(公告)号:US20100258527A1
公开(公告)日:2010-10-14
申请号:US12420074
申请日:2009-04-08
IPC分类号: B44C1/22
CPC分类号: B24B7/241 , C03C17/30 , C03C19/00 , C03C2218/328 , C03C2218/355
摘要: A method of protecting a surface of a device from residual polishing compound comprises applying a thin barrier layer of coating material to the surface of the device; polishing the surface with a polishing compound; rinsing the polishing compound from the device; and removing the thin barrier layer from the surface of the device to remove the residual polishing compound.
摘要翻译: 保护装置的表面免受残余抛光化合物的一种方法包括将薄涂层材料阻挡层施加到装置的表面上; 用抛光剂抛光表面; 从装置中冲洗抛光剂; 以及从所述装置的表面去除所述薄阻挡层以除去残余的抛光化合物。