公开(公告)号：US20170363588A1

公开(公告)日：2017-12-21

申请号：US15535522

申请日：2015-12-16

申请人： Ando FEYN ,  Gary O'BRIEN ,  Bongsang KIM ,  Jochen STEHLE ,  Robert Bosch GmbH

发明人： Ando Feyh ,  Gary O'Brien ,  Bongsang Kim ,  Jochen Stehle

IPC分类号： G01N30/60 ,  B81B1/00 ,  B81C1/00 ,  G01N30/02

CPC分类号： G01N30/6095 ,  B81B1/002 ,  B81B7/00 ,  B81C1/00 ,  B81C1/00023 ,  B81C1/00119 ,  G01N30/60 ,  G01N2030/025

摘要： A micro gas chromatograph includes one or more separator columns formed within a device layer. The separator columns have small channel cross sections and long channel lengths with atomic-smooth channel sidewalls enabling a high channel packaging density, multiple channels positioned on top of each other, and channel segments that are thermally decoupled from the substrates. The micro gas-chromatograph also enables electrostatic and thermal actuators to be positioned in close proximity to the separator columns such that the material passing through the columns is one or more of locally heated, locally cooled, and electrically biased.