公开(公告)号：US20120147350A1

公开(公告)日：2012-06-14

申请号：US13381312

申请日：2010-05-11

申请人： Andrei Yakunin ,  Vadim Banine ,  Denis Glushkov

发明人： Andrei Yakunin ,  Vadim Banine ,  Denis Glushkov

IPC分类号： G03B27/72 ,  H01L21/302 ,  G02B5/22

CPC分类号： G03F7/70925 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70191 ,  G03F7/70575 ,  G03F7/70983 ,  G21K1/06 ,  G21K1/10 ,  G21K2201/067

摘要： A transmissive spectral purity filter configured to transmit extreme ultraviolet radiation includes a filter part having a plurality of apertures to transmit extreme ultraviolet radiation and to suppress transmission of a second type of radiation. The apertures may be manufactured in semiconductor material such as silicon by an anisotropic etching process. The semiconductor material is provided with a hydrogen-resistant layer, such as silicon nitride Si3N4, silicon dioxide SiO2, or silicon carbide SiC.

摘要翻译： 配置为透射极紫外线辐射的透射光谱纯度滤光器包括具有多个孔以过滤极紫外辐射并抑制第二类辐射的透射的滤光器部分。 可以通过各向异性蚀刻工艺在诸如硅的半导体材料中制造孔。 半导体材料设置有耐氮层，例如氮化硅Si 3 N 4，二氧化硅SiO 2或碳化硅SiC。