公开(公告)号：US20170012338A1

公开(公告)日：2017-01-12

申请号：US15274056

申请日：2016-09-23

Applicant: Wentao Wang ,  Andreja Erbes ,  Dana Weinstein ,  Ashwin A. Seshia

Inventor： Wentao Wang ,  Andreja Erbes ,  Dana Weinstein ,  Ashwin A. Seshia

IPC: H01P7/06 ,  H01L41/09 ,  H02N2/00 ,  H01P5/02

CPC classification number: H01P7/065 ,  G01N29/022 ,  G01N2291/0423 ,  G01N2291/106 ,  H01L41/09 ,  H01P5/02 ,  H02N2/001

Abstract: Examples of the present invention include unreleased coupled multi-cavity resonators and transmission filters. In some examples, the resonators include resonant cavities coupled by acoustic couplers (ABGCs) and acoustic reflectors (ABRs). These acoustic components enable improved confinement of acoustic modes within the resonator to increase the quality factor (Q) and lower the motional resistance (Rx). A coupled resonator with 5 cavities coupled by 4 ABGCs can achieve a Q of 1095 while a single-cavity resonator of the same device size has a Q of 760. In some examples, the devices can be configured to work as electronic transmission filters in at least two types of filter configurations. In the transmission line filter configuration, the device can include a filter structure in an arrangement (LH)N H (LH)N, defined as a Fabry-Perot Resonator (FPR). In the multi-pole filter configuration, the device can include a filter structure in an arrangement similar to the multi-cavity resonator design.

Abstract translation: 本发明的实例包括未发布的耦合多腔谐振器和透射滤波器。 在一些示例中，谐振器包括通过声耦合器（ABGC）和声反射器（ABR）耦合的谐振腔。 这些声学组件能够改善谐振器内的声学模式的限制，以增加质量因子（Q）并降低运动电阻（Rx）。 具有5个通过4个ABGC耦合的腔的耦合谐振器可以实现1095的Q，而具有相同器件尺寸的单腔谐振器具有760的Q值。在一些示例中，器件可被配置为作为电子传输滤波器 至少两种类型的过滤器配置。 在传输线滤波器配置中，器件可以包括定义为法布里 - 珀罗谐振器（FPR）的布置（LH）N H（LH）N中的滤波器结构。 在多极滤波器构造中，器件可以包括类似于多腔谐振器设计的布置的滤波器结构。