公开(公告)号：US5621847A

公开(公告)日：1997-04-15

申请号：US450453

申请日：1995-05-25

Applicant: Barton D. Tillotson ,  Anthony J. Schleisman ,  David S. Bollinger ,  Stephen C. Skinner

Inventor： Barton D. Tillotson ,  Anthony J. Schleisman ,  David S. Bollinger ,  Stephen C. Skinner

IPC: B01D1/00 ,  C01B15/01 ,  F24F6/00 ,  C23C14/00

CPC classification number: C01B15/01 ,  B01D1/0029 ,  Y10S159/01 ,  Y10S159/16

Abstract: An ultraclean evaporation system which includes a vessel formed of a fluoropolymer inert to hydrogen peroxide and having an impurity level less than the impurity level of samples to be analyzed therein, preferably perfluoroalkoxy (PFA). A radiant heater is spaced from the vessel for uniformly heating the contents of the vessel. A shield, manufactured of aluminum and coated with a fluoropolymer encases the vessel alone or in conjunction with the heater. An inert gas supply is coupled to the vessel with a coupler of fluoropolymer inert to hydrogen peroxide, preferably PFA. An output is provided from the vessel formed of a fluoropolymer inert to hydrogen peroxide, preferably PFA. An orifice is provided which is formed of a fluoropolymer inert to hydrogen peroxide, preferably PFA, for controlling the flow rate of the inert gas supply. The tubing has a length of at least about 3 meters. The vessel has a side wall and a bottom forming a corner and is disposed so that the corner is the lowest region of the vessel. A vacuum pump is coupled to the outlet of the vessel for creating a dynamic vacuum in the vessel to maintain the mole percentage of hydrogen peroxide vapor in the vessel below 26 mole percent. The vacuum pump is preferably a Venturi vacuum pump with the inert gas supply also directly coupled to the Venturi vacuum pump to create the dynamic vacuum conditions in the vessel. The dynamic vacuum is preferably about 100 Torr.

Abstract translation: 一种超级蒸发系统，其包括由对过氧化氢惰性的含氟聚合物形成的容器，其杂质含量低于要分析的样品的杂质水平，优选全氟烷氧基（PFA）。 辐射加热器与容器间隔开，以均匀地加热容器的内容物。 由铝制成并涂覆有氟聚合物的屏蔽罩单独包装或与加热器结合使用。 惰性气体供应器与具有对过氧化氢惰性的含氟聚合物的成色剂（优选PFA）耦合到容器。 从由对过氧化氢惰性的氟聚合物形成的容器提供输出，优选为PFA。 提供了一种孔口，其由对过氧化氢惰性的氟聚合物形成，优选为PFA，用于控制惰性气体供应的流量。 管道长度至少约3米。 容器具有形成角部的侧壁和底部，并且设置成角部是容器的最低区域。 真空泵联接到容器的出口，用于在容器中产生动态真空，以将容器中的过氧化氢蒸汽的摩尔百分比维持在26摩尔％以下。 真空泵优选为文丘里真空泵，惰性气体供应也直接耦合到文丘里真空泵，以在容器中产生动态真空条件。 动态真空优选为约100托。