公开(公告)号：US5265189A

公开(公告)日：1993-11-23

申请号：US764889

申请日：1991-09-24

申请人： Bernhard Schoenherr

发明人： Bernhard Schoenherr

IPC分类号： C23C14/24 ,  C23C14/26 ,  C23C14/00

CPC分类号： C23C14/26

摘要： In a row evaporator for vacuum vapor depositing apparatus, having a plurality of conductively heated evaporator cells (5, 5', . . . ) disposed in the process chamber (11) and individually controllable in output, and connected to jaw-like electrical contacts (3, 3', . . . ; 4, 4', . . . ), the jaw-like contacts are held by an electrically conductive supporting body (6) extending over the entire length of the row evaporator, while the contacts (3, 3', . . . ) of the one polarity are electrically connected to the supporting body (6), and the contacts (4, 4', . . . ) of the other polarity are subject to the action of a plunger (9, 9', . . . ) which is configured as a cylindrical bolt and is brought outwardly through the wall (10) of the process chamber so as to be vacuum-tight yet longitudinally displaceable, so that the cross-sectional area of this plunger (9, 9', . . . ) remains exposed to atmospheric pressure during the operation of the apparatus, and then presses the contacts or jaws (4, 4', . . . ) against their individual evaporator cells (5, 5', . . . ) with sufficiently measured force.

摘要翻译： 用于真空气相沉积设备的一排蒸发器，具有多个导热加热的蒸发器单元（5,5'，...），其设置在处理室（11）中并且可独立控制输出，并且连接到颚式电触点 （3,3'，...，4,4'，...），颚状触点由在行式蒸发器的整个长度上延伸的导电支撑体（6）保持，而触点 3，3'，...，...）电连接到支撑体（6），并且另一极性的触点（4,4'，...）受到柱塞的作用 9,9'，...），其构造为圆柱形螺栓并且通过处理室的壁（10）向外通过，以便被真空密封且可以纵向移位，使得该截面积 柱塞（9,9'...）在设备运行期间保持暴露于大气压力，然后按压接触点或钳口 4，4'，。 。 。 ）用足够测量的力抵抗其各自的蒸发器单元（5,5'，...）。

公开(公告)号：US5215589A

公开(公告)日：1993-06-01

申请号：US915908

申请日：1992-07-15

申请人： Bernhard Schoenherr ,  Karl-Heinrich Wenk

发明人： Bernhard Schoenherr ,  Karl-Heinrich Wenk

IPC分类号： C23C14/04 ,  C23C14/56

CPC分类号： C23C14/562 ,  C23C14/042

摘要： A high-vacuum coating apparatus for coating films has beneath its coating cylinder (7) a pivoting unit (8) which can turn on a pivot shaft (25). It has an adjustable mask (29) and thereunder a shutter (28) which can run from a position covering an evaporator to a position releasing it. Due to its ability to turn, the pivoting unit (8) together with its parts can easily be cleaned.

摘要翻译： 用于涂膜的高真空涂覆装置在其涂覆滚筒（7）的下方具有能够枢转枢轴（25）的枢转单元（8）。 它具有一个可调节的面罩（29）和一个可以从覆盖蒸发器的位置运行到释放它的位置的挡板（28）。 由于其转动的能力，枢转单元（8）及其部件可以容易地清洁。