Varactor with halo implant regions of opposite polarity
    2.
    发明申请
    Varactor with halo implant regions of opposite polarity 审中-公开
    具有相反极性的晕圈植入区域的变形反应器

    公开(公告)号:US20080079051A1

    公开(公告)日:2008-04-03

    申请号:US11529943

    申请日:2006-09-29

    IPC分类号: H01L29/94 H01L21/20

    摘要: A metal oxide semiconductor varactor may be formed with HALO implants regions having an opposite polarity from the polarity of the well of the varactor. The HALO implant regions can be angled away from the source and drain. The HALO implant regions can stop the depletion from continuing as the bias voltage applied to the gate continues to increase. Stopping that depletion can create a constant capacitance when the varactor is in a depletion bias.

    摘要翻译: 金属氧化物半导体变容二极管可以形成为具有与变容二极管的极性相反极性的HALO注入区域。 HALO植入区域可以远离源极和漏极成角度。 随着施加到栅极的偏置电压继续增加,HALO注入区域可以阻止耗尽继续。 当变容二极管处于耗尽偏压时,停止耗尽可产生恒定电容。