公开(公告)号：US06185019B2

公开(公告)日：2001-02-06

申请号：US09312224

申请日：1999-05-14

Applicant: Douglas S. Hobbs ,  Bruce D. MacLeod ,  Adam F. Kelsey

Inventor： Douglas S. Hobbs ,  Bruce D. MacLeod ,  Adam F. Kelsey

IPC: G03H104

CPC classification number: G03F7/70341 ,  G02B6/02133 ,  G03F7/7035 ,  G03F7/70408 ,  G03H1/00 ,  G03H1/0404

Abstract: A holographic lithography tool (110) for generating a light interference pattern used to expose a photosensitive medium (119) employs a refracting prism (121) in the optical path between divergent illuminating beams (127a, 127b). The prism is optically coupled to the photosensitive medium via an index matching fluid (123). By increasing the incident beam angle and the index of refraction, the prism reduces the size of features recorded in the photosensitive material. The divergent illuminating beams are generated by a beam delivery system which preferably employs easily adjustable fiber optic cables (176, 184). Use of the prism coupling technique facilitates use of fiber-optic-compatible wavelengths in the blue region of the spectrum in a variety of applications, such a distributed feedback grating fabrication.

Abstract translation: 用于产生用于曝光感光介质（119）的光干涉图案的全息光刻工具（110）在发散照明光束（127a，127b）之间的光路中采用折射棱镜（121）。 棱镜通过折射率匹配流体（123）光学耦合到感光介质。 通过增加入射光束角和折射率，棱镜减小了记录在感光材料中的特征的大小。 发散的照明光束由优选使用易于调节的光纤电缆（176,184）的光束传送系统产生。 使用棱镜耦合技术有助于在各种应用（例如分布式反馈光栅制造）中在光谱的蓝色区域中使用光纤兼容波长。