Monitoring patterns for an imaging device and method of monitoring a process using the monitoring patterns
    1.
    发明申请
    Monitoring patterns for an imaging device and method of monitoring a process using the monitoring patterns 审中-公开
    成像设备的监控模式以及使用监控模式监视进程的方法

    公开(公告)号:US20050285166A1

    公开(公告)日:2005-12-29

    申请号:US11090065

    申请日:2005-03-28

    CPC classification number: H01L31/18 H01L27/14601

    Abstract: Monitoring patterns for an imaging device and a method of monitoring processing using the monitoring patterns are disclosed. Processing errors in the imaging device are detected and estimated by measuring resistances between main impurity regions and associated sub impurity regions in the monitoring patterns. Monitoring patterns corresponding to mis-aligned regions in the imaging device have varying resistances between the main impurity region and the associated sub impurity regions.

    Abstract translation: 公开了一种用于成像设备的监视模式和使用监视模式来监视处理的方法。 通过在监测模式中测量主要杂质区域和相关联的子杂质区域之间的电阻来检测和估计成像装置中的处理误差。 对应于成像装置中的不对准区域的监测图案在主要杂质区域和相关联的子杂质区域之间具有变化的电阻。

    Method of detecting defects in image sensor, tester for the method, and control signal generator for the method
    2.
    发明申请
    Method of detecting defects in image sensor, tester for the method, and control signal generator for the method 失效
    检测图像传感器缺陷的方法,方法的测试方法以及该方法的控制信号发生器

    公开(公告)号:US20100097477A1

    公开(公告)日:2010-04-22

    申请号:US12589157

    申请日:2009-10-19

    CPC classification number: H04N17/002

    Abstract: A method of detecting defects in an image sensor that may occur from a floating diffusion area of the image sensor, a tester using the method, and a control signal generator using the method include a photo diode generating charges corresponding to an image signal; a transmission transistor having a first terminal connected to a the photodiode and a second terminal connected to a floating diffusion area, thereby transmitting the charges generated in the photo diode to the floating diffusion area in response to a charge transmission control signal; and a reset transistor having a first terminal applied by a reset voltage and a second transistor connected to the floating diffusion area, thereby transmitting the reset voltage to the floating diffusion area in response to a reset control signal. The reset transistor is turned on during at least one sampling zone selected between reset level sampling and signal level sampling that are performed with respect to the image sensor.

    Abstract translation: 一种检测图像传感器中的可能从图像传感器的浮动扩散区域发生的缺陷的方法,使用该方法的测试仪和使用该方法的控制信号发生器的方法包括:产生与图像信号相对应的电荷的光电二极管; 传输晶体管,其具有连接到光电二极管的第一端子和连接到浮动扩散区域的第二端子,从而响应于电荷传输控制信号将在光电二极管中产生的电荷传输到浮动扩散区域; 以及复位晶体管,其具有通过复位电压施加的第一端子和连接到浮动扩散区域的第二晶体管,从而响应于复位控制信号将复位电压传输到浮动扩散区域。 复位晶体管在相对于图像传感器执行的复位电平采样和信号电平采样之间所选择的至少一个采样区域中导通。

    Method of detecting defects in image sensor, tester for the method, and control signal generator for the method
    3.
    发明授权
    Method of detecting defects in image sensor, tester for the method, and control signal generator for the method 失效
    检测图像传感器缺陷的方法,方法的测试方法以及该方法的控制信号发生器

    公开(公告)号:US08587700B2

    公开(公告)日:2013-11-19

    申请号:US12589157

    申请日:2009-10-19

    CPC classification number: H04N17/002

    Abstract: A method of detecting defects in an image sensor that may occur from a floating diffusion area of the image sensor, a tester using the method, and a control signal generator using the method include a photo diode generating charges corresponding to an image signal; a transmission transistor having a first terminal connected to a the photodiode and a second terminal connected to a floating diffusion area, thereby transmitting the charges generated in the photo diode to the floating diffusion area in response to a charge transmission control signal; and a reset transistor having a first terminal applied by a reset voltage and a second transistor connected to the floating diffusion area, thereby transmitting the reset voltage to the floating diffusion area in response to a reset control signal. The reset transistor is turned on during at least one sampling zone selected between reset level sampling and signal level sampling that are performed with respect to the image sensor.

    Abstract translation: 一种检测图像传感器中的可能从图像传感器的浮动扩散区域发生的缺陷的方法,使用该方法的测试仪和使用该方法的控制信号发生器的方法包括:光电二极管产生与图像信号相对应的电荷; 传输晶体管,其具有连接到光电二极管的第一端子和连接到浮动扩散区域的第二端子,从而响应于电荷传输控制信号将在光电二极管中产生的电荷传输到浮动扩散区域; 以及复位晶体管,其具有通过复位电压施加的第一端子和连接到浮动扩散区域的第二晶体管,从而响应于复位控制信号将复位电压传输到浮动扩散区域。 复位晶体管在相对于图像传感器执行的复位电平采样和信号电平采样之间所选择的至少一个采样区域中导通。

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