公开(公告)号：US06018566A

公开(公告)日：2000-01-25

申请号：US957541

申请日：1997-10-24

申请人： Carol D. Eberhard ,  George G. Pinneo ,  Moshe Sergant

发明人： Carol D. Eberhard ,  George G. Pinneo ,  Moshe Sergant

IPC分类号： G21K1/02 ,  G21K1/00

CPC分类号： G21K1/025

摘要： An X-ray collimator grid is formed within a wafer of monocrystalline silicon material by forming a plurality of spaced parallel elongate slots within a planar surface of a silicon crystal wafer, and forming slats of heavy metal in situs within each of said slots, including squeegeeing the heavy metal into the slots, from particles of heavy metal, each said slat gripping the walls of an associated slot.

摘要翻译： 通过在硅晶片的平坦表面内形成多个间隔开的平行细长槽，并在每个所述槽内形成位于所述槽内的重金属板条，形成在单晶硅材料晶片内的X射线准直器栅格，包括刮板 重金属进入槽，从重金属的颗粒，每个所述的板条抓住相关槽的壁。