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    SUBSTRATE TRANSFER UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TREATING METHOD
    1.
    发明申请
    SUBSTRATE TRANSFER UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TREATING METHOD 审中-公开
    基板传输单元，包括其的基板处理装置和基板处理方法

    公开(公告)号：US20160172224A1

    公开(公告)日：2016-06-16

    申请号：US14956702

    申请日：2015-12-02

    Applicant: Seok Heo ,  Sun Ho Kim ,  Chaemook Lim ,  JaeChul Hwang

    Inventor： Seok Heo ,  Sun Ho Kim ,  Chaemook Lim ,  JaeChul Hwang

    IPC: H01L21/677 ,  H01L21/67 ,  H01L21/687

    CPC classification number: B25J9/042 ,  B25J9/041 ,  H01L21/67742

    Abstract: A substrate transfer unit includes a rotation body, an arm member, and first and second blades. The arm member is on the rotation body, and the first and second blades are on the arm member. The arm member includes a first arm including a lower link on the rotation body and an upper link connected on one side of the lower link and a second arm including a first portion and a second portion. The first portion has a first pivot on the other side of the upper link and is connected with the first blade at a first height from the first pivot. The second portion is connected with the first portion and with the second blade at a second height, higher than the first height, from the first pivot.

    Abstract translation: 基板转印单元包括旋转体，臂构件以及第一和第二叶片。 臂构件在旋转体上，第一和第二叶片在臂构件上。 臂构件包括：第一臂，包括在旋转体上的下连杆和连接在下连杆一侧的上连杆;第二臂包括第一部分和第二部分。 第一部分具有在上连杆的另一侧的第一枢轴，并且在与第一枢轴相距第一高度处与第一叶片连接。 第二部分与第一部分连接，第二部分与第二个叶片相比，第二个高度高于第一个高度。

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