公开(公告)号：US06501076B1

公开(公告)日：2002-12-31

申请号：US09687261

申请日：2000-10-11

申请人： Michael A. Kelly ,  Charles S. Bryson, III

发明人： Michael A. Kelly ,  Charles S. Bryson, III

IPC分类号： H01J4946

CPC分类号： G01N23/227

摘要： An electron energy analyzer integrated with a low-pass energy filter. The electron energy analyzer includes a separation region disposed inside a coil creating a magnetic field parallel to an axis of the separation region. The magnetic field is terminated at both ends of the separation region and shunted by a magnetic yoke around the outside of the coil. Electrons entering the separation region at a polar angle with respect to the axis accumulate an azimuthal angle dependent on the energy of the electron. Thereby, the direction the electron is traveling when it exits the separation angle depends upon its energy. According to the invention, a low-pass reflector is positioned at the input side of the analyzer, for example, a grounded grid in back of which is positioned a negatively biased absorption electrode. Electrons having energy exceeding the electrode bias are absorbed. Electrons having energy less than the electrode bias are reflected and exit the reflector with the same energy as before. The reflector may be curved to focus the electrons. A curved reflector may be used to introduced chromatic dispersion in the electron beam so that electrons of different energies enter the analyzer at different polar angles. A second reflector may be positioned on the other end of the analyzer so that the energy-analyzed electrons are extracted on the input side of the analyzer.

摘要翻译： 与低通能量滤波器集成的电子能量分析仪。 电子能量分析器包括设置在线圈内部的分离区域，产生平行于分离区域的轴线的磁场。 磁场在分离区域的两端处终止，并且被围绕线圈外侧的磁轭分流。 相对于轴以极角进入分离区域的电子根据电子的能量累积方位角。 因此，当电子离开分离角度时，电子行进的方向取决于其能量。 根据本发明，低通反射器位于分析仪的输入侧，例如位于背面的接地格栅位于负偏压的吸收电极。 能量超过电极偏压的电子被吸收。 具有小于电极偏压的能量的电子以与之前相同的能量被反射并离开反射器。 反射器可以是弯曲的以聚焦电子。 可以使用弯曲的反射器在电子束中引入色散，使得不同能量的电子以不同的极角进入分析器。 第二反射器可以位于分析仪的另一端，使得能量分析的电子在分析仪的输入侧被提取。