公开(公告)号：US06452169B1

公开(公告)日：2002-09-17

申请号：US09582247

申请日：2000-06-21

申请人： Hindrik Willem Mook

发明人： Hindrik Willem Mook

IPC分类号： H01J4946

CPC分类号： H01J37/05 ,  H01J49/466

摘要： The invention relates to a Wien filter provided with electrodes for generating an electric field, and magnetic poles for generating a magnetic field, said electrodes and magnetic poles being positioned around and having a finite length along a filter axis, and being positioned around the filter axis such that electric and magnetic forces induced by the respective fields and exerted on an electrically charged particle moving substantially along the fileter axis at a certain velocity, take substantially an opposite direction to one another and are directed substantially perpendicular to the particle's direction of movement through the filter, said filter having along its axis two ends determined by the finite length of the electrodes and magnetic poles, and said ends both being terminated by a closing plate which is positioned substantially transversely to the filter axis and is provided with an aperture around the filter axis to allow the particle to enter into an exit from the filter. The closing plates are made from a material of low electric and magnetic resistance, and the distance from the closing plates to a plane halfway along and perpendicular to the filter axis is at most approximately equal to the shortest distance from the filter axis to the electrodes and/or magnetic poles.

摘要翻译： 本发明涉及一种维恩滤波器，其具有用于产生电场的电极和用于产生磁场的磁极，所述电极和磁极位于沿滤光器轴线周围并具有有限长度并沿着滤光器轴线定位 使得由相应的场感应并施加在基本沿着歪斜轴线以一定速度运动的带电粒子上的电和磁力基本上彼此相反的方向，并且基本上垂直于粒子的移动方向被引导通过 过滤器，所述过滤器沿其轴线由电极和磁极的有限长度确定两端，并且所述端部由基本上横向于过滤器轴线定位的封闭板端接，并且在过滤器周围设置有孔 轴以允许颗粒进入过滤器的出口。 封闭板由低电阻和低磁阻的材料制成，并且从封闭板到平行于滤光器轴线的中心的平面的距离至多近似等于从滤光器轴线到电极的最短距离， /或磁极。

公开(公告)号：US06323485B1

公开(公告)日：2001-11-27

申请号：US09289486

申请日：1999-04-09

申请人： Katsushige Tsuno

发明人： Katsushige Tsuno

IPC分类号： H01J4946

CPC分类号： H01J37/05 ,  H01J37/26

摘要： There is disclosed an electron microscope equipped with an &OHgr;-filter and having an improved energy resolution. An objective lens and an intermediate lens system are mounted upstream of the filter. A projector lens system is mounted downstream of the filter. When a total magnification is entered from an input device, a controller sets the magnification of the projector lens system and the magnification of the lens system upstream of the filter so as to make the energy resolution highest. The exciting portion of the microscope is excited accordingly. Exciting currents for accomplishing a desired magnification are supplied from the exciting portion to the lenses. This optimizes the magnification of the projector lens system and the magnification of the lens system upstream of the &OHgr;-filter, thus achieving higher-energy resolution.

摘要翻译： 公开了配备有OMEGA滤波器并具有改善的能量分辨率的电子显微镜。 物镜和中间透镜系统安装在过滤器的上游。 投影机镜头系统安装在过滤器的下游。 当从输入装置输入总放大率时，控制器将投影仪透镜系统的放大倍率和透镜系统的放大倍率设置在滤光器的上游，以使能量分辨率最高。 显微镜的令人兴奋的部分相应地激发。 用于实现期望倍率的激励电流从激发部分提供给透镜。 这优化了投影仪透镜系统的放大倍数和镜头系统在OMEGA滤镜上游的放大倍数，从而实现更高的能量分辨率。

公开(公告)号：US06384412B1

公开(公告)日：2002-05-07

申请号：US09339822

申请日：1999-06-25

申请人： Dieter Krahl ,  Stephan Kujawa

发明人： Dieter Krahl ,  Stephan Kujawa

IPC分类号： H01J4946

CPC分类号： H01J37/26 ,  H01J37/05 ,  H01J37/153 ,  H01J2237/057

摘要： The invention is directed to an electron microscope having a magnetic energy filter. The energy filter has four deflection regions and seven hexapole correctors for correcting the aberrations of the energy filter. A projection system is mounted downstream of the filter. With the projection system, the achromatic image plane is selectively imaged onto the CCD camera for energy-filtered object imaging or the dispersion plane is imaged on a CCD camera for spectrum detection. For an object registration, the hexapoles are so excited that all geometric aberrations of the second order are corrected in the achromatic image plane and in the dispersion plane. For the spectrum imaging, the excitation of three hexapoles is so changed that the axial chromatic aberration of the filter is corrected while maintaining the correction of the spherical aberration in the achromatic image plane and while maintaining the correction of all geometric errors of the second order in the dispersion plane.

摘要翻译： 本发明涉及具有磁能过滤器的电子显微镜。 能量滤波器具有四个偏转区域和七个六极校正器，用于校正能量滤波器的像差。 投影系统安装在过滤器的下游。 利用投影系统，将无彩色图像平面选择性地成像到用于能量过滤物体成像的CCD照相机上，或者将色散平面成像在CCD照相机上进行光谱检测。 对于物体配准，六极杆是如此激动，使得在无色图像平面和色散平面中校正二阶的所有几何像差。 对于光谱成像，三个六极的激发被改变，使得滤波器的轴向色差被校正，同时保持在无彩色图像平面中的球面像差的校正，同时保持对二阶的所有几何误差的校正 分散平面。

公开(公告)号：US06559445B2

公开(公告)日：2003-05-06

申请号：US09780721

申请日：2001-02-08

申请人： Harald Rose

发明人： Harald Rose

IPC分类号： H01J4946

CPC分类号： H01J37/05 ,  H01J49/48

摘要： The invention relates to an electron energy filter with magnetic deflection regions and a substantially W-shaped beam path. The energy filter has at least four magnetic deflection regions, that are respectively separated from each other by drift paths in the space free from magnetic fields. The whole filter is thus symmetrical with respect to a midplane (M). The total deflection angle in the first and last deflection region is at least 135°, and all the deflection regions together effect a deflection of the optical axis through an angle between 90° and 210°, preferably through 180°. The energy filter has a large Helmholtz length that is greater than double the average value of the deflection radii in the deflection regions.

公开(公告)号：US06501076B1

公开(公告)日：2002-12-31

申请号：US09687261

申请日：2000-10-11

申请人： Michael A. Kelly ,  Charles S. Bryson, III

发明人： Michael A. Kelly ,  Charles S. Bryson, III

IPC分类号： H01J4946

CPC分类号： G01N23/227

摘要： An electron energy analyzer integrated with a low-pass energy filter. The electron energy analyzer includes a separation region disposed inside a coil creating a magnetic field parallel to an axis of the separation region. The magnetic field is terminated at both ends of the separation region and shunted by a magnetic yoke around the outside of the coil. Electrons entering the separation region at a polar angle with respect to the axis accumulate an azimuthal angle dependent on the energy of the electron. Thereby, the direction the electron is traveling when it exits the separation angle depends upon its energy. According to the invention, a low-pass reflector is positioned at the input side of the analyzer, for example, a grounded grid in back of which is positioned a negatively biased absorption electrode. Electrons having energy exceeding the electrode bias are absorbed. Electrons having energy less than the electrode bias are reflected and exit the reflector with the same energy as before. The reflector may be curved to focus the electrons. A curved reflector may be used to introduced chromatic dispersion in the electron beam so that electrons of different energies enter the analyzer at different polar angles. A second reflector may be positioned on the other end of the analyzer so that the energy-analyzed electrons are extracted on the input side of the analyzer.

摘要翻译： 与低通能量滤波器集成的电子能量分析仪。 电子能量分析器包括设置在线圈内部的分离区域，产生平行于分离区域的轴线的磁场。 磁场在分离区域的两端处终止，并且被围绕线圈外侧的磁轭分流。 相对于轴以极角进入分离区域的电子根据电子的能量累积方位角。 因此，当电子离开分离角度时，电子行进的方向取决于其能量。 根据本发明，低通反射器位于分析仪的输入侧，例如位于背面的接地格栅位于负偏压的吸收电极。 能量超过电极偏压的电子被吸收。 具有小于电极偏压的能量的电子以与之前相同的能量被反射并离开反射器。 反射器可以是弯曲的以聚焦电子。 可以使用弯曲的反射器在电子束中引入色散，使得不同能量的电子以不同的极角进入分析器。 第二反射器可以位于分析仪的另一端，使得能量分析的电子在分析仪的输入侧被提取。