公开(公告)号：US20060153045A1

公开(公告)日：2006-07-13

申请号：US10874236

申请日：2004-06-24

申请人： Chih Lee ,  Liang Yu ,  Jiunn Liaw ,  Ding Lin ,  Jyi Yeh ,  Yu Chiu ,  Chun Chen ,  Chyan Wu ,  Chau Yeh ,  You Chang ,  Kuo Huang ,  Yi Chen ,  Yeong Wang

发明人： Chih Lee ,  Liang Yu ,  Jiunn Liaw ,  Ding Lin ,  Jyi Yeh ,  Yu Chiu ,  Chun Chen ,  Chyan Wu ,  Chau Yeh ,  You Chang ,  Kuo Huang ,  Yi Chen ,  Yeong Wang

IPC分类号： G11B7/135 ,  G11B7/00

CPC分类号： G03F7/70383 ,  G01Q60/22 ,  G01Q80/00 ,  G02B27/58 ,  G11B7/1387

摘要： The present invention provides an optical head with a single or multiple sub-wavelength light beams, which can be used in arenas such as photolithography, optical storage, optical microscopy, to name a few. The present invention includes a transparent substrate, a thin film, and a surface structure with sub-wavelength surface profile. The incident light transmits through the transparent substrate, forms a surface plasma wave along the sub-wavelength aperture located within the thin film, and finally re-emits through spatial coupling with the sub-wavelength profile of the surface structure. As the coupled re-emitting light beam or light beams can maintain the waist less than that of the diffraction limit for a few micrometers out of the surface with sub-wavelength profile in many cases, this invention can have applications ranging from micro or nano manufacturing, metrology, and manipulation by using light beams with waist smaller than the diffraction limit.

摘要翻译： 本发明提供了具有单个或多个亚波长光束的光学头，其可以用于诸如光刻，光学存储，光学显微镜等领域。 本发明包括透明基板，薄膜和具有亚波长表面轮廓的表面结构。 入射光透过透明基板，沿着位于薄膜内的亚波长孔径形成表面等离子体波，最后通过与表面结构的亚波长分布的空间耦合重新发射。 由于耦合的再发射光束或光束在许多情况下可以使具有亚波长分布的表面中几微米外的衍射极限的腰部保持较小，所以本发明可以具有从微或纳米制造的应用 ，计量和使用腰围小于衍射极限的光束进行操纵。