PAD BACKER AND CMP PROCESS USING THE SAME
    1.
    发明申请
    PAD BACKER AND CMP PROCESS USING THE SAME 有权
    使用相同的PAD BACKER和CMP工艺

    公开(公告)号:US20060030241A1

    公开(公告)日:2006-02-09

    申请号:US10908781

    申请日:2005-05-26

    IPC分类号: B24B7/30

    CPC分类号: B24B37/32 B24B37/30

    摘要: A pad backer is described, comprising a backing plate, an elastomer layer and a pad backing ring. The elastomer layer has a bottom surface bonded to the backing plate and an upper surface with a protrudent part at the edge portion thereof. The pad backing ring has an inner bottom surface with a recessed part thereon matching with the protrudent part on the upper surface of the elastomer layer, such that the elastomer layer is fixed onto the pad backing ring through engagement of the protrudent part and the recessed part.

    摘要翻译: 描述垫衬垫,其包括背板,弹性体层和衬垫背衬环。 弹性体层具有与背板接合的底表面和在其边缘部分具有突出部分的上表面。 垫衬环具有内底面,其内部的凹部与弹性体层的上表面上的突出部分匹配,使得弹性体层通过突出部和凹部的接合而固定到垫衬环上 。

    Pad backer and CMP process using the same
    2.
    发明授权
    Pad backer and CMP process using the same 有权
    垫片支架和CMP工艺使用相同

    公开(公告)号:US07048615B2

    公开(公告)日:2006-05-23

    申请号:US10908781

    申请日:2005-05-26

    IPC分类号: B24B29/00

    CPC分类号: B24B37/32 B24B37/30

    摘要: A pad backer is described, comprising a backing plate, an elastomer layer and a pad backing ring. The elastomer layer has a bottom surface bonded to the backing plate and an upper surface with a protrudent part at the edge portion thereof. The pad backing ring has an inner bottom surface with a recessed part thereon matching with the protrudent part on the upper surface of the elastomer layer, such that the elastomer layer is fixed onto the pad backing ring through engagement of the protrudent part and the recessed part.

    摘要翻译: 描述垫衬垫,其包括背板,弹性体层和衬垫背衬环。 弹性体层具有与背板接合的底表面和在其边缘部分具有突出部分的上表面。 垫衬环具有内底面,其内部的凹部与弹性体层的上表面上的突出部分匹配,使得弹性体层通过突出部和凹部的接合而固定到垫衬环上 。