公开(公告)号：US06256550B1

公开(公告)日：2001-07-03

申请号：US09131119

申请日：1998-08-07

Applicant: Wen Feng Wu ,  Ming-Hsiu Hsieh ,  Pai-Lan Chen ,  Ching-Ren Chen ,  Hui-Ping Liu

Inventor： Wen Feng Wu ,  Ming-Hsiu Hsieh ,  Pai-Lan Chen ,  Ching-Ren Chen ,  Hui-Ping Liu

IPC: G06F1900

CPC classification number: G05B19/418 ,  G06Q10/0633 ,  Y02P90/02 ,  Y02P90/86

Abstract: A manufacturing control and reporting method/system for manufacture of semiconductor devices comprises a system for loading a mechanical article handling device in a semiconductor manufacturing system, provides an automatic check-in and changing equipment status to an UP status, automatically checking whether the article handling system is empty, and for automatically changing the system status to an IDLE status. The system provides automatic check-in, and subsequent to processing of the workload by the plant provides track-out followed by automatically checking whether the article handling system is empty. Then the system checking whether a TE has arrived, and the system checks whether the TE has reloaded the article handling system.

Abstract translation: 一种用于制造半导体器件的制造控制和报告方法/系统包括：用于在半导体制造系统中装载机械物品处理装置的系统，提供自动检入和更改设备状态到UP状态，自动检查物品处理 系统为空，并将系统状态自动更改为空闲状态。 系统提供自动登记，随后工厂的工作量处理提供跟踪，随后自动检查物品处理系统是否为空。 然后系统检查TE是否到达，并且系统检查TE是否重新加载了物品处理系统。