METHODS AND SYSTEMS FOR IMPROVING ACTUATOR PERFORMANCE BY REDUCING TENSILE STRESSES IN PIEZOELECTRIC THIN FILMS
    1.
    发明申请
    METHODS AND SYSTEMS FOR IMPROVING ACTUATOR PERFORMANCE BY REDUCING TENSILE STRESSES IN PIEZOELECTRIC THIN FILMS 审中-公开
    通过减少压电薄膜中的拉伸应力来提高执行机构性能的方法和系统

    公开(公告)号:US20120245408A1

    公开(公告)日:2012-09-27

    申请号:US13427727

    申请日:2012-03-22

    IPC分类号: A61F11/04 H04R25/00 H02N2/06

    摘要: Disclosed are methods and systems for improving actuator performance by reducing tensile stresses in piezoelectric thin films. In one embodiment, a piezoelectric actuator includes a substrate, a first electrode positioned on the substrate, a piezoelectric thin film positioned on the first electrode, and a second electrode positioned on the piezoelectric thin film. The displacement capability of the actuator is enhanced by reducing the tensile stresses of the piezoelectric thin film. In some embodiments, a constant DC voltage applied to the piezoelectric actuator generates compressive in-plane stresses, which counteract the tensile in-plane stresses. As a result, the overall tensile stresses in the actuator are reduced, and the actuator displacement is improved.

    摘要翻译: 公开了通过降低压电薄膜中的拉伸应力来改善致动器性能的方法和系统。 在一个实施例中,压电致动器包括基板,位于基板上的第一电极,位于第一电极上的压电薄膜和位于压电薄膜上的第二电极。 通过减小压电薄膜的拉伸应力来增强致动器的位移能力。 在一些实施例中,施加到压电致动器的恒定DC电压产生压缩面内应力,其抵消拉伸面内应力。 结果,致动器中的总拉伸应力减小,致动器位移得到改善。