公开(公告)号：US06486951B2

公开(公告)日：2002-11-26

申请号：US09816300

申请日：2001-03-23

Applicant: Ichiro Hirosawa ,  Daisuke Tanooka

Inventor： Ichiro Hirosawa ,  Daisuke Tanooka

IPC: G01J400

CPC classification number: G01N21/211

Abstract: In an apparatus for evaluating an anisotropic thin film, an optical system generates a light beam having a predetermined diameter and polaraization state to project the light beam as incident light into a thin film sample corresponding to the anisotropic thin film. An analyzer is disposed at an optically down stream side of the thin film sample. At an optically down stream side of the analyzer, a two-dimensional photo-intensity detector is disposed to detect reflected light, obtained from the thin film sample, through the analyzer. The detector produces a light intensity distribution. On the basis of the light intensity distribution, an evaluating unit evaluates an inplane distribution of an optical anisotropy of the thin film sample.

Abstract translation: 在用于评估各向异性薄膜的装置中，光学系统产生具有预定直径和极化状态的光束，以将作为入射光的光束投射到与各向异性薄膜相对应的薄膜样品中。 分析仪设置在薄膜样品的光学下游侧。 在分析仪的光学下游侧，设置二维光强度检测器，以通过分析器检测从薄膜样品获得的反射光。 检测器产生光强分布。 基于光强度分布，评价单元评价薄膜样品的光学各向异性的面内分布。