公开(公告)号：US20060043063A1

公开(公告)日：2006-03-02

申请号：US10933167

申请日：2004-09-02

申请人： Leonard Mahoney ,  Daniel Carter ,  Daniel Doran

发明人： Leonard Mahoney ,  Daniel Carter ,  Daniel Doran

IPC分类号： G01L21/30 ,  C23F1/00

CPC分类号： C23F4/00 ,  H01J37/32935 ,  H01L21/67253 ,  H05H1/0081

摘要： A diagnostic plasma probe comprises ion sensors for measuring kinetic properties of plasma ions. Ion sensors of the invention include sensors for measuring differential ion flux, ion energy distributions, and ion incidence angle distributions at or near the surface of the probe. The measurement probe is electrically floating so as to cause minimal disruption of the properties of the processing plasma when disposed into a processing environment. A floating electrical bias is applied to the sensors to obtain measurements of ion properties.

摘要翻译： 诊断等离子体探针包括用于测量等离子体离子的动力学性质的离子传感器。 本发明的离子传感器包括用于测量探针表面处或附近的差分离子通量，离子能量分布和离子入射角分布的传感器。 测量探头是电浮动的，以便当处理环境中时处理等离子体的性质几乎不受破坏。 对传感器施加漂浮的电偏压以获得离子特性的测量。

公开(公告)号：US20050284570A1

公开(公告)日：2005-12-29

申请号：US10875954

申请日：2004-06-24

申请人： Daniel Doran ,  Leonard Mahoney ,  Steven Roberts ,  Gregory Roche

发明人： Daniel Doran ,  Leonard Mahoney ,  Steven Roberts ,  Gregory Roche

IPC分类号： C23F1/00 ,  C23F4/00 ,  G01L21/30 ,  H01J37/32

CPC分类号： C23F4/00 ,  H01J37/32935

摘要： A diagnostic plasma measurement device is provided having sensors and features disposed using pattern transfer fabrication techniques. A measurement device comprises a primary substrate with sensors for measuring plasma or surface properties disposed by a stepped pattern transfer technique, such as step-and-repeat photolithography, about the surface of the probe. Sensor fields include sensors that measure physical and electrical properties of a plasma, as well as sensors that measure properties of the wafer surface. Fields or components for processing electronics, electrical interconnections, memory, photovoltaic power, and wireless communication are also provided. By utilizing pattern transfer fabrication techniques, the invention generally provides for reduced risks of contamination of a plasma processing environment and increased manufacturability and reliability of the completed sensor device.

摘要翻译： 提供诊断等离子体测量装置，其具有使用图案转移制造技术设置的传感器和特征。 测量装置包括具有传感器的初级衬底，该传感器用于通过阶梯式图案转移技术（诸如分步重复光刻法）围绕探针的表面测量等离子体或表面性质。 传感器领域包括测量等离子体的物理和电学特性的传感器以及测量晶片表面性质的传感器。 还提供了用于处理电子，电互连，存储器，光伏电力和无线通信的领域或组件。 通过利用图案转移制造技术，本发明通常提供降低等离子体处理环境的污染风险，并提高完整的传感器装置的可制造性和可靠性。

公开(公告)号：US20050217796A1

公开(公告)日：2005-10-06

申请号：US10815124

申请日：2004-03-31

申请人： Daniel Carter ,  Daniel Doran ,  Leonard Mahoney

发明人： Daniel Carter ,  Daniel Doran ,  Leonard Mahoney

IPC分类号： C23F1/00 ,  H01J37/32

CPC分类号： H01J37/32082 ,  H01J37/32935

摘要： An in-situ plasma measurement probe comprises a primary substrate, such as a silicon wafer, with sensor devices disposed about the surface of the probe. An electronics module contains electronic components or other elements of the diagnostic probe that require isolation and shielding from the plasma environment. The electronics module is disposed upon the probe substrate and electrically connected to the remote sensor devices through one or more electrical interconnection layers disposed upon the substrate. By integrating and modularizing the electronic components of a sensor probe, the probe design may be optimized for cost effective production techniques while ensuring mechanical, chemical, and thermal compatibility with the wafer or other carrying substrate and the environment to which it is exposed.

摘要翻译： 原位等离子体测量探针包括主基底，例如硅晶片，其中传感器装置围绕探针的表面设置。 电子模块包含需要隔离和屏蔽等离子体环境的电子元件或诊断探针的其他元件。 电子模块设置在探针基板上并且通过设置在基板上的一个或多个电互连层电连接到远程传感器装置。 通过集成和模块化传感器探头的电子部件，探针设计可以针对成本有效的生产技术进行优化，同时确保与晶片​​或其他承载基板及其所暴露的环境的机械，化学和热相容性。