公开(公告)号：US5700046A

公开(公告)日：1997-12-23

申请号：US527796

申请日：1995-09-13

申请人： Matthew J. Van Doren ,  Don Sauer ,  Alexander H. Slocum ,  David Pap Rocki ,  Johann Tam ,  Larry Gerszewski

发明人： Matthew J. Van Doren ,  Don Sauer ,  Alexander H. Slocum ,  David Pap Rocki ,  Johann Tam ,  Larry Gerszewski

IPC分类号： B25J15/02 ,  H01L21/687 ,  B25J15/08

CPC分类号： B25J15/026 ,  H01L21/68707 ,  Y10S294/902 ,  Y10S414/141

摘要： A wafer gripper assembly comprises first and second gripping members movably supported relative to each other. A motor propels the gripping members linearly towards and away from each other. Preferably both gripping members are movably supported, and a rotary-to-linear translator produces equal and opposite linear movement of the gripping members. Typically, at least six contactor elements are defined on the pair of gripping members. The contactor elements include a vertically extending portion having an inwardly facing convex surface for contacting an edge of a wafer, and an inwardly extending flange for supporting a lower surface of the wafer.

摘要翻译： 晶片夹持器组件包括相对于彼此可移动地支撑的第一和第二夹持构件。 电动机将夹持构件线性地向彼此推动并远离彼此。 优选地，两个夹持构件可移动地支撑，并且旋转到线性的平移器产生夹持构件的相等且相对的线性移动。 通常，至少六个接触器元件被限定在该对夹持构件上。 接触元件包括垂直延伸的部分，其具有用于接触晶片的边缘的向内的凸形表面和用于支撑晶片的下表面的向内延伸的凸缘。