CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
    2.
    发明申请
    CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same 有权
    包含碳化物形成材料和陶瓷相的CVD金刚石涂层复合基板及其制造方法

    公开(公告)号:US20050276979A1

    公开(公告)日:2005-12-15

    申请号:US11165873

    申请日:2005-06-24

    摘要: The present invention relates to a composite material and the method of making same ,which comprises a CVD diamond coating applied to a composite substrate of ceramic material and an unreacted carbide-forming material of various configurations and for a variety of applications. One example of the composite material is a composite of SiC and free silicon metal known as Reaction-Bonded Silicon Carbide. Several examples of applications of the invention include: 1) heads or disks for conditioning polishing pads, including pads used in Cheniical-Mechanical-Planarization, 2) cutting and dressing tool inserts and tips, 3) heat spreaders for electronic devices, and 4) wear components including mechanical seals and pump seals.

    摘要翻译: 复合材料及其制造方法技术领域本发明涉及一种复合材料及其制造方法,其包括应用于陶瓷材料的复合基板的CVD金刚石涂层以及各种结构的未反应的碳化物形成材料以及各种应用。 复合材料的一个实例是称为反应粘合碳化硅的SiC和游离硅金属的复合材料。 本发明应用的几个实例包括:1)用于调理抛光垫的头或盘,包括在Cheniical-Mechanical-Planarization中使用的垫,2)切割和修整工具插入件和尖端,3)电子设备的散热器,以及4) 磨损部件包括机械密封和泵密封。

    CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
    3.
    发明申请
    CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same 审中-公开
    包含碳化物形成材料和陶瓷相的CVD金刚石涂层复合基板及其制造方法

    公开(公告)号:US20050025973A1

    公开(公告)日:2005-02-03

    申请号:US10627931

    申请日:2003-07-25

    摘要: The present invention relates to a composite material and the method of making same, which comprises a CVD diamond coating applied to a composite substrate of ceramic material and an unreacted carbide-forming material of various configurations and for a variety of applications. One example of the composite material is a composite of SiC and free silicon metal known as Reaction-Bonded Silicon Carbide. Several examples of applications of the invention include: 1) heads or disks for conditioning polishing pads, including pads used in Chemical-Mechanical-Planarization, 2) cutting and dressing tool inserts and tips, 3) heat spreaders for electronic devices, and 4) wear components including mechanical seals and pump seals.

    摘要翻译: 复合材料及其制造方法技术领域本发明涉及一种复合材料及其制造方法,其包括应用于陶瓷材料的复合基板的CVD金刚石涂层以及各种结构的未反应的碳化物形成材料以及各种应用。 复合材料的一个实例是称为反应粘合碳化硅的SiC和游离硅金属的复合材料。 本发明应用的几个实例包括:1)用于调理抛光垫的头或盘,包括用于化学机械平面化的垫,2)切割和修整工具插入件和尖端,3)用于电子设备的散热器,以及4) 磨损部件包括机械密封和泵密封。