公开(公告)号：US07230240B2

公开(公告)日：2007-06-12

申请号：US10931321

申请日：2004-08-31

申请人： James Siebert ,  Lokesh Johri ,  Dennis McCarty ,  Simon Voong ,  Madhumita Sengupta ,  Hui Wang

发明人： James Siebert ,  Lokesh Johri ,  Dennis McCarty ,  Simon Voong ,  Madhumita Sengupta ,  Hui Wang

IPC分类号： H01J37/147 ,  H01J37/256

CPC分类号： H01J37/3023 ,  H01J2237/30483 ,  H01J2237/31737 ,  H01J2237/31749

摘要： A charged particle beam system and scanning control method capable of imaging, and possibly editing, a device under test (DUT). The charged particle beam system contains a charged particle beam generation unit, such as a focused ion beam (FIB) column, which emits a charged particle beam onto the DUT. Also included is a scan controller arrangement implementing a finite state machine to control the application of the charged particle beam onto the DUT according to a plurality of scanning control parameters. The scanning control parameters may describe one or more scan regions that are rectangular in shape. Further, the parameters may describe one or more scan regions describing other shapes by way of a bit-map. Similarly, a method for controlling the scanning of a charged particle beam that involves obtaining a set of scanning control parameters, and then directing the charged particle beam as specified by the scanning control parameters by way of a finite state machine, is disclosed.

摘要翻译： 一种能够成像并可能编辑被测器件（DUT）的带电粒子束系统和扫描控制方法。 带电粒子束系统包含带电粒子束产生单元，例如聚焦离子束（FIB）柱，其将带电粒子束发射到DUT上。 还包括扫描控制器装置，其实现有限状态机以根据多个扫描控制参数来控制将带电粒子束应用到DUT上。 扫描控制参数可以描述形状为矩形的一个或多个扫描区域。 此外，参数可以描述通过位图描述其它形状的一个或多个扫描区域。 类似地，公开了一种用于控制带电粒子束的扫描的方法，该方法包括获得一组扫描控制参数，然后通过有限状态机指定由扫描控制参数指定的带电粒子束。

公开(公告)号：US20060043312A1

公开(公告)日：2006-03-02

申请号：US10931321

申请日：2004-08-31

申请人： James Siebert ,  Lokesh Johri ,  Dennis McCarty ,  Simon Voong ,  Madhumita Sengupta ,  Hui Wang

发明人： James Siebert ,  Lokesh Johri ,  Dennis McCarty ,  Simon Voong ,  Madhumita Sengupta ,  Hui Wang

IPC分类号： H01J37/147

CPC分类号： H01J37/3023 ,  H01J2237/30483 ,  H01J2237/31737 ,  H01J2237/31749

摘要： A charged particle beam system and scanning control method capable of imaging, and possibly editing, a device under test (DUT). The charged particle beam system contains a charged particle beam generation unit, such as a focused ion beam (FIB) column, which emits a charged particle beam onto the DUT. Also included is a scan controller arrangement implementing a finite state machine to control the application of the charged particle beam onto the DUT according to a plurality of scanning control parameters. The scanning control parameters may describe one or more scan regions that are rectangular in shape. Further, the parameters may describe one or more scan regions describing other shapes by way of a bit-map. Similarly, a method for controlling the scanning of a charged particle beam that involves obtaining a set of scanning control parameters, and then directing the charged particle beam as specified by the scanning control parameters by way of a finite state machine, is disclosed.

摘要翻译： 一种能够成像并可能编辑被测器件（DUT）的带电粒子束系统和扫描控制方法。 带电粒子束系统包含带电粒子束产生单元，例如聚焦离子束（FIB）柱，其将带电粒子束发射到DUT上。 还包括扫描控制器装置，其实现有限状态机以根据多个扫描控制参数来控制将带电粒子束应用到DUT上。 扫描控制参数可以描述形状为矩形的一个或多个扫描区域。 此外，参数可以描述通过位图描述其它形状的一个或多个扫描区域。 类似地，公开了一种用于控制带电粒子束的扫描的方法，该方法包括获得一组扫描控制参数，然后通过有限状态机指定由扫描控制参数指定的带电粒子束。