公开(公告)号：US5864773A

公开(公告)日：1999-01-26

申请号：US743113

申请日：1996-11-01

申请人： Gabriel G. Barna ,  Stephanie W. Butler ,  Donald A. Sofge ,  David A. White

发明人： Gabriel G. Barna ,  Stephanie W. Butler ,  Donald A. Sofge ,  David A. White

IPC分类号： H01L21/66 ,  G01B7/00

CPC分类号： H01L22/20

摘要： A virtual sensor based monitoring and fault detection/classification system (10) for semiconductor processing equipment (12) is provided. A plurality of equipment sensors (14) are each operable to measure a process condition and provide a signal representing the measured process condition. A plurality of filtering process units (16) are each operable to receive at least one signal from the plurality of equipment sensors (14) and to reduce data represented by the at least one signal and provide filtered data. A plurality of virtual sensors (24) are each operable to receive the filtered data. The plurality of virtual sensors (24) model states of the processing equipment (12) and a work piece in the processing equipment (12). Each virtual sensor is operable to provide an output signal representing an estimated value for the modeled state. A rule based logic system (26) is operable to receive and process the signals provided by the plurality of equipment sensors (14) and the output signals provided by the virtual sensors (24) to monitor processing equipment (12) or to detect and classify faults within the processing equipment (12).

摘要翻译： 提供了一种用于半导体处理设备（12）的基于虚拟传感器的监视和故障检测/分类系统（10）。 多个设备传感器（14）各自可操作以测量处理条件并提供表示所测量的处理条件的信号。 多个滤波处理单元（16）各自可操作以从多个设备传感器（14）接收至少一个信号，并且减少由至少一个信号表示的数据，并提供滤波数据。 多个虚拟传感器（24）各自可操作以接收经滤波的数据。 多个虚拟传感器（24）对处理设备（12）的状态和处理设备（12）中的工件进行建模。 每个虚拟传感器可操作以提供表示建模状态的估计值的输出信号。 基于规则的逻辑系统（26）可操作以接收和处理由多个设备传感器（14）提供的信号和由虚拟传感器（24）提供的输出信号以监视处理设备（12）或检测和分类 处理设备（12）内的故障。