Virtual sensor based monitoring and fault detection/classification
system and method for semiconductor processing equipment
    1.
    发明授权
    Virtual sensor based monitoring and fault detection/classification system and method for semiconductor processing equipment 失效
    基于虚拟传感器的监控和故障检测/分类系统和半导体处理设备的方法

    公开(公告)号:US5864773A

    公开(公告)日:1999-01-26

    申请号:US743113

    申请日:1996-11-01

    IPC分类号: H01L21/66 G01B7/00

    CPC分类号: H01L22/20

    摘要: A virtual sensor based monitoring and fault detection/classification system (10) for semiconductor processing equipment (12) is provided. A plurality of equipment sensors (14) are each operable to measure a process condition and provide a signal representing the measured process condition. A plurality of filtering process units (16) are each operable to receive at least one signal from the plurality of equipment sensors (14) and to reduce data represented by the at least one signal and provide filtered data. A plurality of virtual sensors (24) are each operable to receive the filtered data. The plurality of virtual sensors (24) model states of the processing equipment (12) and a work piece in the processing equipment (12). Each virtual sensor is operable to provide an output signal representing an estimated value for the modeled state. A rule based logic system (26) is operable to receive and process the signals provided by the plurality of equipment sensors (14) and the output signals provided by the virtual sensors (24) to monitor processing equipment (12) or to detect and classify faults within the processing equipment (12).

    摘要翻译: 提供了一种用于半导体处理设备(12)的基于虚拟传感器的监视和故障检测/分类系统(10)。 多个设备传感器(14)各自可操作以测量处理条件并提供表示所测量的处理条件的信号。 多个滤波处理单元(16)各自可操作以从多个设备传感器(14)接收至少一个信号,并且减少由至少一个信号表示的数据,并提供滤波数据。 多个虚拟传感器(24)各自可操作以接收经滤波的数据。 多个虚拟传感器(24)对处理设备(12)的状态和处理设备(12)中的工件进行建模。 每个虚拟传感器可操作以提供表示建模状态的估计值的输出信号。 基于规则的逻辑系统(26)可操作以接收和处理由多个设备传感器(14)提供的信号和由虚拟传感器(24)提供的输出信号以监视处理设备(12)或检测和分类 处理设备(12)内的故障。

    Module bypass switch for balancing battery pack system modules
    2.
    发明授权
    Module bypass switch for balancing battery pack system modules 有权
    用于平衡电池组系统模块的模块旁路开关

    公开(公告)号:US09099871B2

    公开(公告)日:2015-08-04

    申请号:US12899413

    申请日:2010-10-06

    IPC分类号: H02J7/00

    CPC分类号: H02J7/0016

    摘要: A battery pack system module may include a module bypass switch for allowing charge current to bypass the battery pack system module. A charge switch and a discharge switch may be coupled with the module bypass switch. When other battery pack system modules are coupled in series with the module, balancing between modules may be achieved by allowing charge current to bypass the unbalanced modules and charge other modules. For example, when an unbalanced module is at a higher level of charge than other modules, a charge switch and a discharge switch in the unbalanced module de-activate and a module bypass switch activates to allow charge current to rapidly bring other modules into balance. The discharge switch and the charge switch allow the charging current to bypass the unbalanced module creating little or no additional heat dissipation.

    摘要翻译: 电池组系统模块可以包括用于允许充电电流绕过电池组系统模块的模块旁路开关。 充电开关和放电开关可以与模块旁路开关耦合。 当其他电池组系统模块与模块串联耦合时,可以通过允许充电电流绕过不平衡模块并对其他模块充电来实现模块之间的平衡。 例如,当不平衡模块处于比其他模块更高的电荷水平时,不平衡模块中的充电开关和放电开关被禁用,并且模块旁路开关激活,以允许充电电流快速使其他模块平衡。 放电开关和充电开关允许充电电流绕过不平衡模块,几乎不产生额外的散热。

    Module Bypass Switch for Balancing Battery Pack System Modules
    3.
    发明申请
    Module Bypass Switch for Balancing Battery Pack System Modules 有权
    用于平衡电池组系统模块的模块旁路开关

    公开(公告)号:US20120086400A1

    公开(公告)日:2012-04-12

    申请号:US12899413

    申请日:2010-10-06

    IPC分类号: H02J7/00

    CPC分类号: H02J7/0016

    摘要: A battery pack system module may include a module bypass switch for allowing charge current to bypass the battery pack system module. A charge switch and a discharge switch may be coupled with the module bypass switch. When other battery pack system modules are coupled in series with the module, balancing between modules may be achieved by allowing charge current to bypass the unbalanced modules and charge other modules. For example, when an unbalanced module is at a higher level of charge than other modules, a charge switch and a discharge switch in the unbalanced module de-activate and a module bypass switch activates to allow charge current to rapidly bring other modules into balance. The discharge switch and the charge switch allow the charging current to bypass the unbalanced module creating little or no additional heat dissipation.

    摘要翻译: 电池组系统模块可以包括用于允许充电电流绕过电池组系统模块的模块旁路开关。 充电开关和放电开关可以与模块旁路开关耦合。 当其他电池组系统模块与模块串联耦合时,可以通过允许充电电流绕过不平衡模块并对其他模块充电来实现模块之间的平衡。 例如,当不平衡模块处于比其他模块更高的电荷水平时,不平衡模块中的充电开关和放电开关被禁用,并且模块旁路开关激活,以允许充电电流快速使其他模块平衡。 放电开关和充电开关允许充电电流绕过不平衡模块,几乎不产生额外的散热。

    Ultrasound imaging guidewire with static central core and tip
    5.
    发明授权
    Ultrasound imaging guidewire with static central core and tip 失效
    超声成像导丝带静电中心芯和尖端

    公开(公告)号:US06770035B2

    公开(公告)日:2004-08-03

    申请号:US10405586

    申请日:2003-04-01

    IPC分类号: A61B814

    CPC分类号: A61B8/12 A61B8/4461 A61M25/09

    摘要: An ultrasound imaging guidewire, that is inserted into a patient's body. The guidewire has a static central core and an imaging guidewire body comprising an acoustical scanning device. The acoustical scanning device can be rotated to obtain 360 degree acoustical images of a site of interest in the patients body. Furthermore, the imaging guidewire includes a connector that permits the imaging guidewire body to be disengaged from the static central core tip so that the imaging guidewire body can be axially translated to obtain multi-position imaging. The imaging guidewire body is axially translated without losing the original guidewire positioning because the static central core maintains its position in the patient's body.

    摘要翻译: 超声成像导丝,其被插入患者体内。 引导线具有静电中心芯和包括声学扫描装置的成像导丝主体。 可以旋转声学扫描装置以获得患者身体中感兴趣的部位的360度声学图像。 此外,成像引导线包括允许成像导丝主体从静态中心芯尖脱离的连接器,使得成像导丝主体可以被轴向平移以获得多位置成像。 成像导丝主体轴向平移而不会损失原始的导丝定位,因为静态中心芯保持其在患者体内的位置。

    Off-aperture electrical connection for ultrasonic transducer
    6.
    发明授权
    Off-aperture electrical connection for ultrasonic transducer 失效
    超声波换能器的孔径电气连接

    公开(公告)号:US06733456B1

    公开(公告)日:2004-05-11

    申请号:US09613819

    申请日:2000-07-10

    IPC分类号: A61B800

    CPC分类号: B06B1/067 A61B8/4494

    摘要: The present invention provides catheter systems and imaging assemblies using off-aperture electrical connections for ultrasound transducers. In one embodiment, a catheter includes a transducer connection apparatus (10) comprising a washer (12) having a hole (15) therethrough. A transducer element (24) is at least partially disposed within the washer hole. A matching layer (26) is operably attached to the washer and to the transducer element. The washer, transducer element and matching layer provide an electrical connection between the transducer element and the washer. Signals can be sent to and received from the transducer by establishing an electrical connection with the washer.

    摘要翻译: 本发明提供使用超声换能器的孔外电连接的导管系统和成像组件。 在一个实施例中,导管包括换能器连接装置(10),其包括具有穿过其中的孔(15)的垫圈(12)。 传感器元件(24)至少部分地设置在垫圈孔内。 匹配层(26)可操作地附接到垫圈和换能器元件。 垫圈,换能器元件和匹配层在换能器元件和垫圈之间提供电气连接。 可以通过与洗衣机建立电气连接,将信号发送到传感器并从传感器接收信号。

    System for intraluminal imaging
    7.
    发明授权

    公开(公告)号:US06626853B2

    公开(公告)日:2003-09-30

    申请号:US09863091

    申请日:2001-05-22

    IPC分类号: A61B500

    摘要: An improved catheter system having an ultrasonic imaging transducer coupled to a drive cable disposed within a lumen of a flexible tubular catheter body. An improvement including a reconfiguration of the ferrites in the hub assembly, such that the need for the gap between the ferrites is removed. A strain relief member is provided to increase the strength of the electrical transmission lines to enable them to withstand the tensile forces caused by either flushing and/or pull-back operations. A device which allows the electrical transmission lines to extend their length when placed in tension may also be employed to provide strain relief to the electrical transmission lines. Another improvement includes a counter-wound coil structure, which may either expand or contract as the drive cable is being rotated to strengthen the drive cable. The distal tip of the catheter body may be redesigned to provide a lumen which allows for the release of flushing fluids through a distal port in the guidewire lumen.

    Cartridge shell casing collector and method therefor
    9.
    发明授权
    Cartridge shell casing collector and method therefor 失效
    筒式壳套管收集器及其方法

    公开(公告)号:US06470618B1

    公开(公告)日:2002-10-29

    申请号:US10067557

    申请日:2002-02-07

    申请人: David A. White

    发明人: David A. White

    IPC分类号: F41A1500

    CPC分类号: F41C27/00

    摘要: A cartridge shell casing collector and method therefor capable of allowing a user to easily collect shell casings discharged from a gun without having to bend over or come into direct physical contact with the discharged cartridge shell casings.

    摘要翻译: 一种盒式外壳收集器及其方法,其能够允许用户容易地收集从枪排出的壳体,而不必弯曲或者与排出的盒壳壳体直接物理接触。

    System and method for intraluminal imaging

    公开(公告)号:US06419644B1

    公开(公告)日:2002-07-16

    申请号:US09425495

    申请日:1999-10-22

    IPC分类号: A61B500

    摘要: An improved catheter system having an ultrasonic imaging transducer coupled to a drive cable disposed within a lumen of a flexible tubular catheter body. An improvement including a reconfiguration of the ferrites in the hub assembly, such that the need for the gap between the ferrites is removed. A strain relief member is provide to increase the strength of the electrical transmission lines to enable them to withstand the tensile forces caused by either flushing and/or pull-back operations. A device which allows the electrical transmission lines to extend their length when placed in tension may also be employed to provide strain relief to the electrical transmission lines. Another improvement includes a counter-wound coil structure, which may either expand or contract as the drive cable is being rotated to strengthen the drive cable. The distal tip of the catheter body may be redesigned to provide a lumen which allows for the release of flushing fluids through a distal port in the guidewire lumen.