公开(公告)号：US06504134B1

公开(公告)日：2003-01-07

申请号：US09660996

申请日：2000-09-13

申请人： Dwo-Yao Sheu ,  Kuo-Cheng Chang ,  Chih-Hsien Shen ,  Chia-Hsing Huang

发明人： Dwo-Yao Sheu ,  Kuo-Cheng Chang ,  Chih-Hsien Shen ,  Chia-Hsing Huang

IPC分类号： H05B102

CPC分类号： H01L21/67248 ,  Y10T307/773

摘要： A temperature controlling protection system for a heater of the wet etching device has a temperature controlling protection circuit and a heating ON/OFF controller, in which the temperature controlling circuit has an OR gate, an AND gate and a NOT gate. When the temperature controlling protection circuit receives signals from the wet etching device, such as a level signal for a level sensor, an overheated signal for a temperature sensor, a ON/OFF signal for an acid discharging switch, a protection signal and a caution signal for the heater 28 and output signal for a constant temperature controller, it is determined whether the heater of the wet etching device is actuated to provide heat to the reaction gas in the wet etching device.

摘要翻译： 湿蚀刻装置的加热器的温度控制保护系统具有温度控制保护电路和加热ON / OFF控制器，其中温度控制电路具有或门，与门和非门。 当温度控制保护电路接收来自湿式蚀刻装置的信号，例如电平传感器的电平信号，温度传感器的过热信号，酸性放电开关的ON / OFF信号，保护信号和警告信号 对于加热器28和用于恒温控制器的输出信号，确定湿蚀刻装置的加热器是否被致动以向湿式蚀刻装置中的反应气体提供热量。