公开(公告)号：US20210091252A1

公开(公告)日：2021-03-25

申请号：US17032223

申请日：2020-09-25

申请人： Amir H. Atabaki ,  Rajeev J. RAM ,  Ebrahim Dakhil Al Johani

发明人： Amir H. Atabaki ,  Rajeev J. RAM ,  Ebrahim Dakhil Al Johani

IPC分类号： H01L31/105 ,  H01L31/0368

摘要： Photodetectors using photonic crystals (PhCs) in polysilicon film that include an in-plane resonant defect. A biatomic photodetector includes an optical defect mode that is confined from all directions in the plane of the PhC by the photonic bandgap structure. The coupling of the resonance (or defect) mode to out-of-plane radiation can be adjusted by the design of the defect. Further, a “guided-mode resonance” (GMR) photodetector provides in-plane resonance through a second-order grating effect in the PhC. Absorption of an illumination field can be enhanced through this resonance.