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公开(公告)号：US06310020B1
公开(公告)日：2001-10-30
申请号：US09426183
申请日：1999-10-25
申请人： Mami Shirota , Kozo Kitazawa , Eiji Kashihara , Eiji Nagoshi
发明人： Mami Shirota , Kozo Kitazawa , Eiji Kashihara , Eiji Nagoshi
IPC分类号： C11D726
CPC分类号： C11D7/265 , C11D3/162 , C11D7/261 , C11D7/263 , C11D7/266 , C11D7/32 , C11D7/3245 , C11D7/34 , C11D7/5009 , C11D11/0047 , G03F7/425 , G03F7/426
摘要： A stripping composition for a resist comprising a polycarboxylic acid and/or a salt thereof, and water, wherein a pH of the stripping composition is less than 8; and a stripping composition for a resist comprising 0.01 to 90% by weight of an organic acid and/or a salt thereof, 2 to 74% by weight of water, and 0.5 to 90% by weight of an organic solvent, wherein a pH of the stripping composition is less than 8; and a method of stripping a resist from a substrate, comprising applying one of the stripping composition to the substrate.
摘要翻译： 包含多元羧酸和/或其盐的抗蚀剂剥离组合物和水，其中汽提组合物的pH小于8; 以及抗蚀剂用剥离组合物，其含有0.01〜90重量％的有机酸和/或其盐，2〜74重量％的水和0.5〜90重量％的有机溶剂，其中，pH 剥离组合物小于8; 以及从基底剥离抗蚀剂的方法，包括将一种汽提组合物施加到基底上。
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公开(公告)号：US5958298A
公开(公告)日：1999-09-28
申请号：US540978
申请日：1995-10-11
申请人： Eiji Nagoshi , Kozo Kitazawa
发明人： Eiji Nagoshi , Kozo Kitazawa
CPC分类号： C11D1/721 , C11D11/0023 , C11D3/2068 , C11D3/28 , C11D3/30
摘要： The anti-corrosive draining agent for use in a rinsing process includes a polyoxyalkylene alkyl ether as an essential component. The anti-corrosive draining agent further includes an amine compound as an essential component, wherein the polyoxyalkylene alkyl ether (a) and the amine compound (b) are contained in a blending weight ratio (a/b) of from 99/1 to 80/20. The rinsing process using water following a cleaning process, includes the steps of adding the above anti-corrosive draining agent to a rinsing water, and rinsing an object in the rinsing water.
摘要翻译： 用于漂洗工艺的防腐蚀排水剂包括聚氧化烯烷基醚作为必需组分。 防腐蚀排水剂还包含胺化合物作为必要成分，其中以99/1至80的共混重量比（a / b）包含聚氧化烯烷基醚（a）和胺化合物（b） / 20。 在清洁处理之后使用水的冲洗过程包括以下步骤：将上述防腐蚀排水剂加入到漂洗水中，并在冲洗水中冲洗物体。
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