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1.发明授权Method for processing output of scanning type probe microscope, and scanning type probe microscope 失效扫描型探针显微镜输出处理方法及扫描型探针显微镜公开(公告)号：US08225418B2
公开(公告)日：2012-07-17
申请号：US13133595
申请日：2009-12-07
申请人： Eika Tsunemi , Nobuo Satoh , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Eika Tsunemi , Nobuo Satoh , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
CPC分类号： G01Q20/02
摘要： Incident light 19 emitted from a laser light source 18 is reflected on an upper surface of a cantilever 13, so that reflected light 19a enters light detection means 20. Since the incident light 19 and the reflected light 19a are in a plane not including a long axis of the cantilever 13, movements of the reflected light 19a due to change in a deflection amount θ of the cantilever 13 and due to change in a fine vertical movement amount z thereof are different in direction on the light detection means 20. This enables the change in the deflection amount θ of the cantilever 13 and the change in the fine vertical movement amount z thereof to be separated from output of the light detection means 20.
摘要翻译： 从激光光源18发射的入射光19在悬臂13的上表面上被反射，使得反射光19a进入光检测装置20.由于入射光19和反射光19a处于不包括长的 悬臂13的轴线，由于偏转量的变化引起的反射光19a的运动; 并且由于其微小的垂直移动量z的变化在光检测装置20上的方向不同。这使得偏转量的变化是可能的。 并且其微细垂直移动量z的变化与光检测装置20的输出分离。
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2.发明申请METHOD FOR PROCESSING OUTPUT OF SCANNING TYPE PROBE MICROSCOPE, AND SCANNING TYPE PROBE MICROSCOPE 失效扫描型探针显微镜输出方法及扫描型探针显微镜公开(公告)号：US20110247107A1
公开(公告)日：2011-10-06
申请号：US13133595
申请日：2009-12-07
申请人： Eika Tsunemi , Nobuo Satoh , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Eika Tsunemi , Nobuo Satoh , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02
摘要： Incident light 19 emitted from a laser light source 18 is reflected on an upper surface of a cantilever 13, so that reflected light 19a enters light detection means 20. Since the incident light 19 and the reflected light 19a are in a plane not including a long axis of the cantilever 13, movements of the reflected light 19a due to change in a deflection amount θ of the cantilever 13 and due to change in a fine vertical movement amount z thereof are different in direction on the light detection means 20. This enables the change in the deflection amount θ of the cantilever 13 and the change in the fine vertical movement amount z thereof to be separated from output of the light detection means 20.
摘要翻译： 从激光光源18发射的入射光19在悬臂13的上表面上被反射，使得反射光19a进入光检测装置20.由于入射光19和反射光19a处于不包括长的 悬臂13的轴线，由于偏转量的变化引起的反射光19a的运动; 并且由于其微小的垂直移动量z的变化在光检测装置20上的方向不同。这使得偏转量的变化是可能的。 并且其微细垂直移动量z的变化与光检测装置20的输出分离。
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