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    Scan device for microscope measurement instrument
    3.
    发明授权
    Scan device for microscope measurement instrument 有权
    扫描仪用于显微镜测量仪器

    公开(公告)号：US08796654B2

    公开(公告)日：2014-08-05

    申请号：US13056293

    申请日：2008-07-31

    申请人： Masahiro Ohta ,  Noriaki Oyabu ,  Kenjiro Kimura ,  Shinichiro Ido ,  Kei Kobayashi ,  Hirofumi Yamada ,  Kazumi Matsushige

    发明人： Masahiro Ohta ,  Noriaki Oyabu ,  Kenjiro Kimura ,  Shinichiro Ido ,  Kei Kobayashi ,  Hirofumi Yamada ,  Kazumi Matsushige

    IPC分类号： G01N21/86 ,  G01V8/00 ,  G01N35/10 ,  G01Q10/06 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  B82Y35/00

    CPC分类号： G01N35/1011 ,  B82Y35/00 ,  G01Q10/065 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/20228

    摘要： A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.

    摘要翻译： 将探针连续地移动到设置在样本上的测量区域中的多个测量点，以测量z位移量。 激励控制单元根据位移检测单元的检测输出反馈控制压电元件，使得悬臂的振动振幅恒定。 此外，垂直位移控制单元反馈控制垂直位置扫描单元，以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。 当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时，主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。 结果，可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。 这消除了不必要的测量时间，这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。

    Semiconductor device with fault detection function
    4.
    发明授权
    Semiconductor device with fault detection function 有权
    具有故障检测功能的半导体器件

    公开(公告)号：US08497695B2

    公开(公告)日：2013-07-30

    申请号：US12227441

    申请日：2007-06-13

    申请人： Chiaki Matoba ,  Kei Kobayashi

    发明人： Chiaki Matoba ,  Kei Kobayashi

    IPC分类号： G01R31/3187

    CPC分类号： G01R31/2856 ,  H01L21/78 ,  H01L22/34 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A semiconductor device (1) detecting damage to the peripheral part of a chip which could potentially grow into a defect includes: a wire (3) formed along the outer periphery of a semiconductor chip (2d) to detect damage; a detection circuit (4) provided in the semiconductor chip (2) to supply a detection signal to the wire (3) to detect a break in the wire (3); an output terminal (5) for outputting the detection signal having passed through the wire (3); an internal circuit (6) provided in the semiconductor chip (2); an output switching circuit (7) selecting either an output signal of the internal circuit (6) or the detection signal having passed the wire (3) for output to the output terminal (5); a heating element (15a) heating the peripheral part of the chip; a power supply circuit (16) supplying power to the heating element; and a temperature detection/control circuit (17) controlling the heating by the heating element. This configuration enables easy detection of damage to the chip by logic test without additional measurement terminals. The configuration also enables detection of chips which could develop a defect when packaged.

    摘要翻译： 检测对潜在生长成缺陷的芯片的周边部分的损坏的半导体器件（1）包括：沿着半导体芯片（2d）的外周形成的用于检测损伤的线（3） 设置在半导体芯片（2）中的检测电路（4），用于向线（3）提供检测信号以检测线（3）中的断裂; 输出端子（5），用于输出已经通过导线（3）的检测信号; 设置在所述半导体芯片（2）中的内部电路（6） 输出切换电路（7），选择内部电路（6）的输出信号或通过导线（3）的检测信号输出到输出端子（5）; 加热芯片周边部分的加热元件; 电源电路（16），向所述加热元件供电; 以及控制加热元件的加热的温度检测/控制电路（17）。 该配置可以通过逻辑测试轻松检测芯片的损坏，无需附加的测量端子。 该配置还能够检测在封装时可能产生缺陷的芯片。

    Scan Device
    5.
    发明申请
    Scan Device 有权
    扫描设备

    公开(公告)号：US20110261352A1

    公开(公告)日：2011-10-27

    申请号：US13056293

    申请日：2008-07-31

    申请人： Masahiro Ohta ,  Noriaki Oyabu ,  Kenjiro Kimura ,  Shinichiro Ido ,  Kei Kobayashi ,  Hirofumi Yamada ,  Kazumi Matsushige

    发明人： Masahiro Ohta ,  Noriaki Oyabu ,  Kenjiro Kimura ,  Shinichiro Ido ,  Kei Kobayashi ,  Hirofumi Yamada ,  Kazumi Matsushige

    IPC分类号： G01N21/01

    CPC分类号： G01N35/1011 ,  B82Y35/00 ,  G01Q10/065 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/20228

    摘要： A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.

    摘要翻译： 将探针连续地移动到设置在样本上的测量区域中的多个测量点，以测量z位移量。 激励控制单元根据位移检测单元的检测输出反馈控制压电元件，使得悬臂的振动振幅恒定。 此外，垂直位移控制单元反馈控制垂直位置扫描单元，以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。 当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时，主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。 结果，可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。 这消除了不必要的测量时间，这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。

    BINDER COMPOSITION FOR NONAQUEOUS ELECTROLYTE SECONDARY BATTERY ELECTRODE AND NONAQUEOUS ELECTROLYTE SECONDARY BATTERY
    6.
    发明申请
    BINDER COMPOSITION FOR NONAQUEOUS ELECTROLYTE SECONDARY BATTERY ELECTRODE AND NONAQUEOUS ELECTROLYTE SECONDARY BATTERY 有权
    非电解电解质二次电池电极和非电解电解质二次电池的粘合剂组合物

    公开(公告)号：US20110003202A1

    公开(公告)日：2011-01-06

    申请号：US12919894

    申请日：2009-02-27

    申请人： Yasuhiro Wakizaka ,  Kei Kobayashi

    发明人： Yasuhiro Wakizaka ,  Kei Kobayashi

    IPC分类号： H01M4/02 ,  C08L9/00 ,  C08K5/05 ,  H01M4/90

    CPC分类号： H01M4/621 ,  H01M4/0404 ,  H01M4/139 ,  H01M4/62 ,  H01M4/622 ,  H01M10/0525 ,  H01M10/4235

    摘要： Disclosed is a binder composition for a nonaqueous electrolyte secondary battery electrode including an antioxidizing agent, able to inhibit the thickening of an electrode slurry. The binder composition enables to form electrode slurry without making the antioxidizing agent adhere to the insides of fine pores of electrode active materials after coating and drying. The binder composition for a nonaqueous electrolyte secondary battery electrode contains a binder and an emulsified antioxidizing agent, and particularly, it is preferable that the binder is an aqueous binder including a diene-based polymer and that the antioxidizing agent is a polymeric phenol compound.

    摘要翻译： 公开了一种能够抑制电极浆料增稠的含有抗氧化剂的非水电解质二次电池电极用粘合剂组合物。 粘合剂组合物能够在涂布和干燥之后不使抗氧化剂粘附到电极活性材料的细孔内部而形成电极浆料。 非水电解质二次电池用电极用粘合剂组合物含有粘合剂和乳化抗氧化剂，特别优选粘合剂为包含二烯类聚合物的水性粘合剂，抗氧化剂为聚合物酚化合物。

    Molecular Device and Manufacturing Method for the Same
    8.
    发明申请
    Molecular Device and Manufacturing Method for the Same 审中-公开
    分子装置及其制造方法

    公开(公告)号：US20080119008A1

    公开(公告)日：2008-05-22

    申请号：US11661316

    申请日：2005-08-30

    申请人： Yuji Miyato ,  Kei Kobayashi ,  Hirofumi Yamada ,  Kazumi Matsushige

    发明人： Yuji Miyato ,  Kei Kobayashi ,  Hirofumi Yamada ,  Kazumi Matsushige

    IPC分类号： H01L51/40

    CPC分类号： H01L51/0049 ,  B81C1/00031 ,  B81C2201/0149 ,  B81C2201/0198 ,  B82Y10/00 ,  B82Y30/00 ,  H01L29/0665 ,  H01L29/0673 ,  H01L51/0048 ,  H01L51/0575

    摘要： A molecular device of the present invention is arranged so that a self-organizing monomolecular layer is formed on an oxide layer made of an oxide of a substrate by being chemically bonded with the surface of the oxide layer, and nano structures are formed on the monomolecular film. With this arrangement, the present invention provides a molecular device which causes less interaction between the substrate and nanostructures arranged on the substrate, thereby realizing easier control of orientation of nano structures on the substrate. The present invention also provides a manufacturing method of the molecular device.

    摘要翻译： 本发明的分子装置被配置成通过与氧化物层的表面化学键合而在由氧化物的氧化物构成的氧化物层上形成自组织单分子层，并且在单分子层上形成纳米结构 电影。 通过这种布置，本发明提供了一种分子器件，其在衬底和布置在衬底上的纳米结构之间引起较少的相互作用，从而实现了更容易地控制衬底上的纳米结构的取向。 本发明还提供了分子装置的制造方法。

    Method of manufacturing electrode for lithium secondry batteries
    9.
    发明申请
    Method of manufacturing electrode for lithium secondry batteries 失效
    锂二次电池电极的制造方法

    公开(公告)号：US20060228467A1

    公开(公告)日：2006-10-12

    申请号：US11390477

    申请日：2006-03-28

    申请人： Masaki Hirase ,  Hiromasa Yagi ,  Daizo Jito ,  Kei Kobayashi ,  Katsunobu Sayama

    发明人： Masaki Hirase ,  Hiromasa Yagi ,  Daizo Jito ,  Kei Kobayashi ,  Katsunobu Sayama

    IPC分类号： B05D5/12

    CPC分类号： H01M4/139 ,  H01M4/0404 ,  H01M4/0421 ,  H01M4/0435 ,  H01M4/131 ,  H01M4/134 ,  H01M4/386 ,  H01M4/525 ,  H01M4/661 ,  H01M10/052

    摘要： A method of manufacturing an electrode for a lithium secondary battery in which a thin film of active material is deposited on a current collector is provided that eliminates adverse effects on the battery caused by protrusions adhered on an electrode surface. The method of manufacturing an electrode for lithium secondary batteries includes depositing a thin film of active material on a current collector using thin-film deposition equipment as shown in FIG. 1, and performing a compression process after depositing the thin film, whereby the heights of protrusions formed on the electrode surface are reduced.

    摘要翻译： 提供了一种制造其中在集电器上沉积活性材料薄膜的锂二次电池的电极的方法，其消除了由附着在电极表面上的突起引起的对电池的不利影响。 制造锂二次电池用电极的方法包括使用如图1所示的薄膜沉积设备在集电体上沉积活性材料薄膜。 如图1所示，并且在沉积薄膜之后进行压缩处理，由此在电极表面上形成的突起的高度减小。

    Method of producing master and working pattern plates for etching and photolithographic apparatus therefor
    10.
    发明授权
    Method of producing master and working pattern plates for etching and photolithographic apparatus therefor 失效

    公开(公告)号：US5801833A

    公开(公告)日：1998-09-01

    申请号：US580637

    申请日：1995-12-29

    申请人： Kei Kobayashi ,  Yoji Shiraishi

    发明人： Kei Kobayashi ,  Yoji Shiraishi

    IPC分类号： G03F7/20 ,  G01B9/02

    CPC分类号： G03F7/70475 ,  G03F7/70716

    摘要： In a method of producing master and working pattern plates for etching to form a shadow mask, various etching patterns are needed, for example, a pattern of predetermined holes for passing electron beams, a pattern of register marks necessary for accurate alignment of a pair of obverse and reverse working pattern plates, and a frame pattern for cutting off a portion which is to be a shadow mask from a metal plate by etching process. These individual pattern data required for etching are first prepared and then subjected to logical operation to prepare data representative of a synthetic pattern which is to be finally drawn on a photosensitive plate. Then, all the necessary patterns, including the frame pattern, register mark pattern, hole pattern, etc., are formed by continuous and collective exposure process by use of the synthetic pattern data, thereby eliminating the need for the step of aligning the individual patterns by a manual operation, which has heretofore been essential for multiple exposure, and thus solving not only the conventional problems in terms of both quality and process but also the problem attributable to the positioning accuracy of a photolithographic apparatus in which control is effected by a laser interferometric measuring device in an environment other than a vacuum.