公开(公告)号：US5687045A

公开(公告)日：1997-11-11

申请号：US554027

申请日：1995-11-06

申请人： Tetsuya Okai ,  Moriaki Fuyama ,  Akira Onuma ,  Eiji Ashida ,  Hiroshi Ikeda ,  Saburo Suzuki ,  Yasuo Wakaki ,  Yoshiki Hagiwara ,  Eimi Ando

发明人： Tetsuya Okai ,  Moriaki Fuyama ,  Akira Onuma ,  Eiji Ashida ,  Hiroshi Ikeda ,  Saburo Suzuki ,  Yasuo Wakaki ,  Yoshiki Hagiwara ,  Eimi Ando

IPC分类号： G11B5/31 ,  G11B5/60 ,  G11B5/235

CPC分类号： G11B5/6005 ,  G11B5/3106 ,  G11B5/3109 ,  G11B5/3116 ,  G11B5/3163

摘要： A thin film magnetic head comprising a sintered ceramic substrate, an underlayer, a bottom magnetic core film, a magnetic gap film, an insulating film containing coil windings, a top magnetic core film, and a protective layer. The substrate and other films and layers form an air bearing surface. The under layer, the magnetic gap film and the protective layer comprise Al.sub.2 O.sub.3, and the bottom and the top magnetic core films comprise Ni--Fe alloy. This structure gives substantially the same etching rate, when the air bearing surface is polished using a working fluid of pH 6-8, for any of the substrate, the films comprising Al.sub.2 O.sub.3 and metal oxide described above, and the films of Ni--Fe alloy. Thus, steps (pole top recessions) on the air bearing surface can be made as small as 0.015 .mu.m or less. Accordingly, the magnetic head can be held in a stable attitude, thus obtaining good recording characteristics.

摘要翻译： 一种薄膜磁头，包括烧结陶瓷衬底，底层，底部磁芯膜，磁隙膜，含有线圈绕组的绝缘膜，顶部磁芯膜和保护层。 衬底和其它膜和层形成空气轴承表面。 底层，磁隙膜和保护层包括Al2O3，底部和顶部磁芯膜包括Ni-Fe合金。 当使用pH6-8的工作流体对任何基板，包含上述Al 2 O 3和金属氧化物的膜以及Ni-Fe合金膜进行抛光时，该结构基本上具有相同的蚀刻速率 。 因此，空气轴承表面上的台阶（极顶部凹陷）可以制成小至0.015μm或更小。 因此，可以将磁头保持在稳定的姿态，从而获得良好的记录特性。