公开(公告)号：US20240353480A1

公开(公告)日：2024-10-24

申请号：US18756801

申请日：2024-06-27

申请人： Peter James O'Brien ,  Bradley Robert Yates ,  Joshua Marcus Yablon ,  Mark Joseph Koeper ,  Mario Jesus Olmedo ,  Oumarou Mbombo Njoya ,  Evelyn Sze Wing Chin

发明人： Peter James O'Brien ,  Bradley Robert Yates ,  Joshua Marcus Yablon ,  Mark Joseph Koeper ,  Mario Jesus Olmedo ,  Oumarou Mbombo Njoya ,  Evelyn Sze Wing Chin

IPC分类号： G01R31/28

CPC分类号： G01R31/2884

摘要： Methods and apparatus for voltage contrast defect inspection are disclosed. An example apparatus includes a substrate. The example apparatus further includes a virtual ground layer coupled to the substrate. The example apparatus also includes at least one process layer coupled to the virtual ground layer, the at least one process layer including a conductive feature.