公开(公告)号：US09739592B2

公开(公告)日：2017-08-22

申请号：US14929028

申请日：2015-10-30

Applicant: FOUNDATION FOR RESEARCH AND BUSINESS, SEOUL NATIONAL UNIVERISTY OF SCIENCE AND TECHNOLOGY

Inventor： Ik-Keun Park ,  Hae-Sung Park ,  Tae-Sung Park ,  Dong-Ryul Kwak

IPC: G01B11/02 ,  G01B9/02

CPC classification number: G01B9/02027 ,  G01B9/02018 ,  G01B9/02019

Abstract: A multiple beam path laser optical system using a multiple beam reflector. The multiple beam path laser optical system includes a light source part to generate a laser beam to be irradiated to a specimen, the multiple beam reflector to split a laser beam incident thereto from the light source part and to provide a plurality of optical paths, a main beam splitter to irradiate the laser beam split by the multiple beam reflector to the specimen, a transducer to excite the specimen for signal detection of the laser beam irradiated to the specimen, and a control part to analyze an interference pattern of a laser beam reflected from the specimen and recombined in the main beam splitter.