公开(公告)号：US5324478A

公开(公告)日：1994-06-28

申请号：US931656

申请日：1992-08-17

申请人： Francois Mermoud ,  Michael D. Brandt

发明人： Francois Mermoud ,  Michael D. Brandt

IPC分类号： G01N33/00 ,  G05D11/035

CPC分类号： G01N33/0006 ,  G05D11/035 ,  Y10T137/2499

摘要： Gas generating apparatus in which a supply of carrier gas is mixed with an impurity gas that permeates through the membrane of an impurity gas generator. A dopant gas is supplied to the impurity gas generator through a pressure controller which operates in response to a pressure monitor that monitors the pressure of the dopant gas supplied to the impurity gas generator. As the monitored pressure of the supplied dopant gas changes, the pressure of that supplied gas likewise changes in a manner which maintains a substantially constant flow rate of the impurity gas through the membrane to be mixed with a carrier gas.

摘要翻译： 气体发生装置，其中载气的供给与渗透通过杂质气体发生器的膜的杂质气体混合。 掺杂剂气体通过压力控制器供应到杂质气体发生器，该压力控制器响应于监测供应给杂质气体发生器的掺杂气体的压力的压力监测器而工作。 随着所提供的掺杂气体的监测压力发生变化，所供给的气体的压力同样以保持通过膜的杂质气体的基本上恒定的流速与载气混合的方式发生变化。

公开(公告)号：US4849174A

公开(公告)日：1989-07-18

申请号：US85888

申请日：1987-08-14

申请人： Michael D. Brandt ,  Francois Mermoud

发明人： Michael D. Brandt ,  Francois Mermoud

IPC分类号： G01N1/00 ,  G01N33/00 ,  G05D11/035

CPC分类号： G05D11/035 ,  G01N33/0006

摘要： A device adapted to generate a gas flow containing a precise amount of impurities. The device comprises a membrane through which an impurity gas peremeates and mixing means to make a mixture of said impurity gas and a vector gas sweeping said membrane. The pressure of said mixture is substantially constant, but adjustable, to enhance the accuracy of the device.