公开(公告)号：US20110123043A1

公开(公告)日：2011-05-26

申请号：US12625157

申请日：2009-11-24

申请人： Franz Felberer ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan Van Lippen ,  Iris Bominaar-Silkens

发明人： Franz Felberer ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan Van Lippen ,  Iris Bominaar-Silkens

IPC分类号： H04B15/00 ,  H04R3/06

CPC分类号： H04R19/005 ,  H04R2410/00

摘要： A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generate a signal in response to sound. The back-plate is separated from the membrane by an insulator and the back-plate exhibits a spring constant. The microphone further includes a back-chamber that encloses the opening to form a pressure chamber with the membrane, and a tuning structure configured to set a resonance frequency of the back-plate to a value that is substantially the same as a value of a resonance frequency of the membrane.

摘要翻译： 电容式微机电系统（MEMS）麦克风包括具有延伸穿过基板的开口的半导体基板。 麦克风具有延伸穿过开口的膜和延伸穿过开口的背板。 膜被配置为响应于声音产生信号。 背板通过绝缘体与膜隔开，背板呈现弹簧常数。 麦克风还包括后室，其包围开口以与膜形成压力室，调谐结构被配置为将背板的共振频率设定为与谐振值基本相同的值 膜的频率。

公开(公告)号：US09344805B2

公开(公告)日：2016-05-17

申请号：US12625157

申请日：2009-11-24

申请人： Franz Felberer ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan van Lippen ,  Iris Bominaar-Silkens

发明人： Franz Felberer ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan van Lippen ,  Iris Bominaar-Silkens

IPC分类号： H04R3/06 ,  H04B15/00 ,  H04R19/00

CPC分类号： H04R19/005 ,  H04R2410/00

摘要： A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generate a signal in response to sound. The back-plate is separated from the membrane by an insulator and the back-plate exhibits a spring constant. The microphone further includes a back-chamber that encloses the opening to form a pressure chamber with the membrane, and a tuning structure configured to set a resonance frequency of the back-plate to a value that is substantially the same as a value of a resonance frequency of the membrane.

摘要翻译： 电容式微机电系统（MEMS）麦克风包括具有延伸穿过基板的开口的半导体基板。 麦克风具有延伸穿过开口的膜和延伸穿过开口的背板。 膜被配置为响应于声音产生信号。 背板通过绝缘体与膜隔开，背板呈现弹簧常数。 麦克风还包括后室，其包围开口以与膜形成压力室，调谐结构被配置为将背板的共振频率设定为与谐振值基本相同的值 膜的频率。