公开(公告)号：US4547276A

公开(公告)日：1985-10-15

申请号：US605456

申请日：1984-04-30

申请人： Fred J. Cadieu

发明人： Fred J. Cadieu

IPC分类号： C23C14/14 ,  H01F10/13 ,  H01F41/18

CPC分类号： H01F10/136 ,  C23C14/14 ,  H01F41/18

摘要： Samples of the Sm-Fe system are directly crystallized onto heated substra by selectively thermalized sputtering with the addition of titanium as a stabilizing agent.

摘要翻译： 通过添加钛作为稳定剂，通过选择性热化溅射将Sm-Fe体系的样品直接结晶到加热的基底上。

公开(公告)号：US06805916B2

公开(公告)日：2004-10-19

申请号：US10622264

申请日：2003-07-17

申请人： Fred J. Cadieu

发明人： Fred J. Cadieu

IPC分类号： C23C1428

CPC分类号： H01J37/32321 ,  C23C14/221 ,  C23C14/28

摘要： A tapered profile magnetic field pulsed laser deposition (PLD) system and method for depositing a thin film on a substrate are provided. The system includes a tapered pulsed coil arranged relative to a confinement magnetic device so that the plume discharged from the confinement magnetic device is collected and concentrated by an inwardly tapered surface of the tapered pulsed coil which causes the plume to be deflected towards a substrate on which the charged species are deposited to form the thin film. In yet a further aspect, a device for maintaining cleanliness of an interior of a deposition chamber laser entry window through which a laser beam enters and converges to a target is provided. A plume that is generated when a laser beam ablates the target is ionized as a result of radioactive members such that the ionized plume is deflected toward one of the first members (e.g., metal plates) as opposed to coating the interior of the laser entry window.

公开(公告)号：US06799531B2

公开(公告)日：2004-10-05

申请号：US10051211

申请日：2002-01-16

申请人： Fred J. Cadieu

发明人： Fred J. Cadieu

IPC分类号： C23C1428

CPC分类号： H01J37/32321 ,  C23C14/221 ,  C23C14/28

摘要： A simple, relatively inexpensive, yet effective PLD method is provided for forming extremely clean films with reduced particulate densities and size. A PLD system is used for producing the thin films and includes a PLD chamber wherein a laser beam ablates a target material creating an ionized plasma plume of ions and electrons which is diverted and deposited onto a substrate using a confinement magnet and a deflection magnet. Each of the confinement magnet and the deflection magnet generates an axial magnetic field which is generally parallel to the laser beam plume ejection direction. The charged constituents of the plume are influenced by the magnetic fields and are thus deflected to the substrate, while the larger atomic clusters and particulates are advantageously not deflected. An electric field can also be used to aid in the deflection of the charged plume species. The electric field can be separately modulated to control the film deposition onto the substrate. This method favors useful film properties, such as crystallinity and good adhesion, even at room temperature, because it relies upon using high energy ions for the deposition.

摘要翻译： 提供了一种简单，相对便宜且有效的PLD方法，用于形成具有降低的颗粒密度和尺寸的极其干净的膜。 PLD系统用于制造薄膜并且包括PLD室，其中激光束消除目标材料，从而产生离子和电子的离子化等离子体羽毛，其使用约束磁体和偏转磁体转移并沉积到基板上。 每个约束磁体和偏转磁体都产生大致平行于激光束羽流喷射方向的轴向磁场。 羽流的带电成分受到磁场的影响，因此偏转到基底，而更大的原子团和微粒有利地不偏转。 也可以使用电场来帮助带电羽状物质的偏转。 电场可以被单独调制以控制在衬底上的膜沉积。 这种方法即使在室温下也有利于膜的有效性能，如结晶度和粘附性，因为它依赖于使用高能离子进行沉积。

公开(公告)号：US5982177A

公开(公告)日：1999-11-09

申请号：US907793

申请日：1997-08-08

申请人： Fred J. Cadieu

发明人： Fred J. Cadieu

IPC分类号： G01R33/09 ,  G11B5/39 ,  G11B5/127 ,  G01N27/72 ,  G01R33/02

CPC分类号： G11B5/3903 ,  G01R33/09 ,  G01R33/096

摘要： A magnetic sensor for detecting the presence of a magnetic sample proximate a sensing region. A magnetoresistive element is positioned in a biasing region of the sensor which is spaced apart from the sensing region. A magnetic circuit provides a magnetic field to the sensing region and the biasing region. The magnetic field biases the magnetoresistive element positioned in the biasing region. A circuit detects changes in the magnetic field in the biasing region as a function of changes in the resistance of the magnetoresistive element whereby changes in the magnetic field caused by the presence of a magnetic sample proximate the sensing region are detected.

摘要翻译： 一种用于检测靠近感测区域的磁性样本的存在的磁传感器。 磁阻元件位于传感器的与感测区域间隔开的偏压区域中。 磁路向感测区域和偏置区域提供磁场。 磁场偏置位于偏置区域中的磁阻元件。 电路根据磁阻元件的电阻的变化来检测偏置区域中的磁场的变化，从而检测由接近感测区域的磁性样品的存在引起的磁场的变化。