公开(公告)号：US06736705B2

公开(公告)日：2004-05-18

申请号：US09844407

申请日：2001-04-27

申请人： Frederick P. Benning ,  Douglas Allan Kuchta ,  Steven L. Maynard ,  Jon Edward Podolske

发明人： Frederick P. Benning ,  Douglas Allan Kuchta ,  Steven L. Maynard ,  Jon Edward Podolske

IPC分类号： B24B100

CPC分类号： B24B37/08

摘要： Disk substrates are polished in a process which uses a single load of the disks to a polishing apparatus and a single polishing slurry. Preferably, the process varies at least one polishing parameter at multiple stages to achieve both a reasonable rate of removal during one stage and a smooth finished surface during another stage. Preferably, a fine grit cerium oxide slurry is used, along with a polishing pad having surface characteristics intermediate those of relatively hard pads typically used for material removal, and of relatively soft pads typically used for fine finishing. The polisher operates at high pressure and speed during a material removal stage, and then reduces speed and pressure during a finishing stage to achieve a suitable surface finish, without removing and cleaning disks between the two stages.

摘要翻译： 在将抛光装置和单个抛光浆料使用单个载荷盘的过程中对盘基材进行抛光。 优选地，该过程在多个阶段改变至少一个抛光参数，以在另一阶段期间实现在一个阶段期间合理的去除速率和平滑的成品表面。 优选地，使用细小的氧化铈浆料，以及具有与通常用于除去材料的相对硬的垫片相比具有中间体的抛光垫以及通常用于精加工的相对软的垫片。 抛光机在材料去除阶段以高压和高速运行，然后在精加工阶段降低速度和压力，以达到合适的表面光洁度，而无需拆卸和清洁两台之间的盘片。

公开(公告)号：US06254461B1

公开(公告)日：2001-07-03

申请号：US09526404

申请日：2000-03-15

申请人： Frederick P. Benning ,  Dennis L. Fox ,  James A Hagan ,  Kerry R. Lindemann ,  Donald L. Mabe

发明人： Frederick P. Benning ,  Dennis L. Fox ,  James A Hagan ,  Kerry R. Lindemann ,  Donald L. Mabe

IPC分类号： B24B2900

CPC分类号： B24B53/017

摘要： A dressing disk for dressing and reconditioning the polishing pad of a planetary disk polishing machine is fabricated by plating a nickel/diamond matrix layer onto a stainless steel disk wherein the matrix layer thickness is developed or plated to a thickness which leaves exposed about 25 percent of the fine diamond particles, thereby forming a surface that has the look and feel of medium to coarse sandpaper. The dressing disks are inserted into the holes in a disk carrier of a planetary polishing machine and driven by its central rotary drive. While being so driven under a flow of water to carry away abraded particles, a pair of polishing pads are engaged with the disk surfaces and forced together with a loading or down force to cause the disks to abrade or grind away a thin surface layer of the polishing pad, thereby removing glazing and exposing cerium particles embedded in the urethane matrix of the polishing pad to engage the glass disks to be polished to a very smooth surface for use as substrates for magnetic memory disks useable in disk drives.

摘要翻译： 通过将镍/金刚石基体层电镀在不锈钢盘上制造用于修整和修复行星盘抛光机的抛光垫的修整盘，其中基质层厚度显影或镀覆到厚度，该厚度留下约25％ 精细的金刚石颗粒，从而形成具有中粗砂纸的外观和感觉的表面。 修整盘插入行星抛光机的盘载体中的孔中并由其中心旋转驱动驱动。 当在水流下被驱动以携带磨损的颗粒时，一对抛光垫与盘表面接合并且以加载或向下的力一起被迫在一起，以使盘磨损或研磨掉薄的表面层 抛光垫，从而去除玻璃并暴露嵌入在抛光垫的聚氨酯基体中的铈颗粒，以将要抛光的玻璃盘接合到非常光滑的表面上，以用作可用于磁盘驱动器的磁存储盘的基板。

公开(公告)号：US07070703B2

公开(公告)日：2006-07-04

申请号：US10154024

申请日：2002-05-23

申请人： Frederick P. Benning ,  Steven L. Maynard ,  David C. Paurus ,  Jon Edward Podolske

发明人： Frederick P. Benning ,  Steven L. Maynard ,  David C. Paurus ,  Jon Edward Podolske

IPC分类号： B44C1/22 ,  B24B1/00

CPC分类号： C03C19/00 ,  C03C15/02

摘要： A polished glass disk is prepared for a magnetically recordable coating by texturing the surfaces with a highly abrasive material being abrasively engaged with the surfaces as the disk is rotated, thereby creating a relatively coarse texture with the abrasions concentric with the axis of rotation of the disk. Thereafter, the roughness of the texturing is reduced by abrading the surface of the disk with a polishing pad and an etchant slurry of colloidal silica. The etchant component has the property of attacking or softening the glass disk during the fine polishing with the colloidal silica slurry. As both the texturing step and the fine polishing step deposit a plurality of concentric abrasions on a glass disk, these abrasions aid in retaining the magnetically recordable coating deposited thereon to complete a magnetically recordable disk for use as a data storage member.

摘要翻译： 为磁性可记录涂层制备抛光玻璃盘，通过在盘旋转时与表面磨蚀性地接合的高度磨蚀的材料进行纹理化，从而产生相对粗糙的质地，其磨损与盘的旋转轴线同心 。 此后，通过用抛光垫和胶体二氧化硅的蚀刻剂浆料研磨盘的表面来减少纹理的粗糙度。 蚀刻剂组分在用胶体二氧化硅浆液进行精细抛光时具有攻击或软化玻璃盘的性质。 由于纹理化步骤和精细抛光步骤都在玻璃盘上沉积多个同心磨擦，所以这些磨损有助于保持沉积在其上的磁性可记录涂层以完成用作数据存储部件的磁性可记录盘。

公开(公告)号：US06752687B2

公开(公告)日：2004-06-22

申请号：US09843832

申请日：2001-04-30

申请人： Frederick P. Benning ,  Steven L. Maynard ,  David C. Paurus ,  Jon Edward Podolske

发明人： Frederick P. Benning ,  Steven L. Maynard ,  David C. Paurus ,  Jon Edward Podolske

IPC分类号： B24B722

CPC分类号： B24B53/017 ,  B24B37/042

摘要： A method of preparing for a disk polishing operation includes providing a polishing machine having a first and a second superposed platen. A first polishing pad is on the first platen and a second polishing pad is on the second platen. A plurality of carriers are disposed between the first and second polishing pads. Each carrier is adapted to rotate relative to the polishing pads and is adapted to carry at least one glass disk. A pressure, temperature and rotational speed of the polishing machine used during a disk polishing operation are determined. A number of diamond disks are provided. A diamond disk is placed in respective ones of the carriers. The polishing machine is operated at or near the determined pressure, temperature and rotational speed while simultaneously dressing the respective surfaces of the polishing pads using the diamond disks.

摘要翻译： 准备盘抛光操作的方法包括提供具有第一和第二叠置压板的抛光机。 第一抛光垫在第一压板上，第二抛光垫位于第二压板上。 多个载体设置在第一和第二抛光垫之间。 每个载体适于相对于抛光垫旋转并且适于承载至少一个玻璃盘。 确定在盘抛光操作期间使用的抛光机的压力，温度和转速。 提供了许多钻石盘。 将金刚石盘放置在相应的一个载体中。 抛光机在等于或接近确定的压力，温度和转速下操作，同时使用金刚石圆盘修整抛光垫的各个表面。