公开(公告)号：US07615834B2

公开(公告)日：2009-11-10

申请号：US11707623

申请日：2007-02-16

申请人： Burtis Khuri-Yakub ,  Arif Sanli Ergun ,  G. Göksenin Yaralioglu ,  Yongli Huang ,  Sean Hansen

发明人： Burtis Khuri-Yakub ,  Arif Sanli Ergun ,  G. Göksenin Yaralioglu ,  Yongli Huang ,  Sean Hansen

IPC分类号： H01L41/113 ,  H01L29/84

CPC分类号： B81B3/0086 ,  B06B1/0292 ,  B81B3/007 ,  B81B2201/0257 ,  B81B2203/0127 ,  H01L28/40

摘要： Structure for capacitive micromachined ultrasonic transducer (CMUT) device or other vibrating membrane device having non-uniform membrane so that membrane mass and stiffness characteristics may be substantially independently adjusted. CMUT having trenched membrane and/or membrane with non-uniform thickness or density. Method for operating transducer or vibrating membrane device. Array of devices at least some of which have non-uniform membrane properties. CMUT comprising substrate, support for membrane, and membrane extending over support to create cavity, membrane having non-uniform membrane thickness resulting from at least one of: thickening on upper surface of the membrane outside of cavity, thickening on lower surface of membrane inside cavity, trench on upper surface of membrane, trench on lower surface of the membrane, and any combination of two or more of these. Method for fabricating CMUT or vibrating membrane device having non-uniform membrane. High mechanical sensitivity transducer for sensor, microphone, and/or transmitter.

摘要翻译： 用于电容微加工超声波换能器（CMUT）装置或具有不均匀膜的其它振动膜装置的结构，使得膜质量和刚度特性可以基本上独立地调节。 CMUT具有沟槽的膜和/或具有不均匀厚度或密度的膜。 操作换能器或振动膜装置的方法。 至少其中一些具有不均匀膜性质的器件阵列。 CMUT包括衬底，用于膜的支撑件和在支撑件上延伸以产生空腔的膜，膜具有由以下至少一个产生的不均匀的膜厚度：在腔外部的膜的上表面上增厚，在腔内的膜的下表面上增厚 膜的上表面的沟槽，膜的下表面上的沟槽，以及这些中的两个或更多个的任意组合。 制造具有不均匀膜的CMUT或振动膜装置的方法。 用于传感器，麦克风和/或变送器的高机械灵敏度传感器。