公开(公告)号：US5909346A

公开(公告)日：1999-06-01

申请号：US882370

申请日：1997-06-25

申请人： Arun Malhotra ,  G. Robert Gray

发明人： Arun Malhotra ,  G. Robert Gray

IPC分类号： G11B5/31 ,  G11B5/48 ,  G11B5/147

CPC分类号： G11B5/488 ,  G11B5/31 ,  G11B5/3116 ,  G11B5/3183

摘要： A thin film magnetic head assembly is provided which includes a plurality of thin film heads situated atop a common substrate. An insulative main body is built up layer by layer on the substrate. A plurality of magnetic yokes exhibiting different geometries are situated on the substrate and within the main body. The magnetic yokes are built up layer by layer at the same time that the insulative main body is fabricated. A plurality of coil structures are situated within the main body and are magnetically coupled to respective magnetic yokes. The head assembly also includes a pedestal of insulative material situated atop the main body and exhibiting a lateral dimension less than that of the main body. The pedestal protrudes upwardly away from the main body and substrate. The magnetic yokes each include a pole piece pair situated atop the pedestal, each pole piece pair including first and second magnetic pole pieces. Each pole piece pair exhibits a different geometry than another pole piece pair. Each pole piece pair forms a head which is adapted to reading/writing a track on a magnetic medium, the tracks of which are compatible with the geometry of that pole piece pair.

摘要翻译： 提供一种薄膜磁头组件，其包括位于公共衬底顶部的多个薄膜头。 在基板上逐层建立绝缘主体。 呈现不同几何形状的多个磁轭位于基板上并在主体内。 在制造绝缘主体的同时，磁轭被逐层地构建。 多个线圈结构位于主体内并磁耦合到相应的磁轭。 头部组件还包括位于主体顶部并具有小于主体的横向尺寸的绝缘材料的基座。 基座从主体和基板向上突出。 磁轭各自包括位于基座顶部的极靴对，每个极片对包括第一和第二磁极片。 每个极片对具有与另一个极片对不同的几何形状。 每个极片对形成头部，其适于在磁性介质上读取/写入轨道，轨道与该极靴对的几何形状兼容。

公开(公告)号：US5853558A

公开(公告)日：1998-12-29

申请号：US789913

申请日：1997-01-31

申请人： G. Robert Gray ,  Arun Malhotra

发明人： G. Robert Gray ,  Arun Malhotra

IPC分类号： G11B5/31 ,  G11B5/105 ,  G11B5/127 ,  G11B5/17 ,  H01F41/04 ,  C25D5/02

CPC分类号： G11B5/17 ,  G11B5/105 ,  G11B5/127 ,  H01F41/046 ,  G11B5/313

摘要： A thin film helical conductor coil assembly includes an electrically-nonconducting ceramic substrate having a substantially planar surface and separated first and second magnetic elements which mutually bound a volume of the ceramic substrate. The thin film conductor coil assembly also includes a thin film magnetic core, which magnetically connects the first magnetic element to the second magnetic element. The thin film magnetic core, which overlies the substantially planar surface of the ceramic substrate, is constructed from a compliant electroplated magnetic material. The thin film conductor coil assembly further includes an electroplated thin film helical coil which traverses about the thin film magnetic core and forms a conductive path from a first terminal to a second terminal.

摘要翻译： 薄膜螺旋导体线圈组件包括具有基本平坦的表面的电非导体陶瓷衬底，并且分离的第一和第二磁性元件相互结合陶瓷衬底的体积。 薄膜导体线圈组件还包括将第一磁性元件与第二磁性元件磁连接的薄膜磁芯。 覆盖在陶瓷基板的基本上平坦的表面上的薄膜磁芯由柔性电镀的磁性材料构成。 薄膜导体线圈组件还包括电镀薄膜螺旋线圈，其绕薄膜磁芯穿过并形成从第一端子到第二端子的导电路径。

公开(公告)号：US5754377A

公开(公告)日：1998-05-19

申请号：US296388

申请日：1994-08-26

申请人： G. Robert Gray ,  Arun Malhotra

发明人： G. Robert Gray ,  Arun Malhotra

IPC分类号： G11B5/23 ,  G11B5/235 ,  G11B5/31 ,  G11B5/48 ,  G11B5/147

CPC分类号： G11B5/488 ,  G11B5/3103 ,  G11B5/3106 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3133 ,  G11B5/3146 ,  G11B5/3163 ,  G11B5/3183 ,  G11B5/232 ,  G11B5/235 ,  G11B5/3113 ,  G11B5/4893 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046

摘要： A thin film magnetic head is provided in which a magnetic yoke assembly is built up, layer by layer, atop a substrate using semiconductor thin film techniques. A lower yoke assembly is first fabricated including a lower magnetic layer situated on the substrate and first and second side poles built up vertically from the ends of the lower magnetic layer. An insulative pedestal surrounded by a frame is formed at the top of the lower yoke assembly and extends above the uppermost lateral plane of the yoke assembly. A diamond-like carbon (DLC) wear layer is deposited atop the pedestal. First and second pole support wells are excavated in the DLC layer so as to expose the first and second side poles therebelow, and further to receive first and second pole supports, respectively, therein. First and second pole extension members are situated on the first and second pole support members, respectively, with a non-magnetic gap region being situated between the first and second pole extension members. A second DLC layer is situated in the same plane as the non-magnetic gap region and the first and second pole extension members. The second DLC layer substantially surrounds the first and second side pole extensions and the gap region. In this manner, the gap region is elevated above the plane of the first and second pole support members and is protected from undesired head wear.

摘要翻译： 提供一种薄膜磁头，其中使用半导体薄膜技术逐层地在基板顶上构建磁轭组件。 首先制造下轭组件，其包括位于衬底上的下磁层和从下磁层的端部垂直构成的第一和第二侧极。 在框架的顶部形成有由框架包围的绝缘基座，并且在轭组件的最上侧的横向平面上方延伸。 钻石状碳（DLC）耐磨层沉积在基座顶部。 第一和第二极支撑井在DLC层中被挖掘，以便露出其下的第一和第二侧极，并且还分别容纳第一和第二极支撑。 第一和第二极延伸构件分别位于第一和第二极支撑构件上，非磁性间隙区域位于第一和第二极延伸构件之间。 第二DLC层位于与非磁隙区域以及第一和第二极延伸构件相同的平面中。 第二DLC层基本上围绕第一和第二侧极延伸部分和间隙区域。 以这种方式，间隙区域升高到第一和第二极支撑构件的平面之上，并且防止间隙区域发生不期望的头部磨损。

公开(公告)号：US6091581A

公开(公告)日：2000-07-18

申请号：US795268

申请日：1997-02-10

申请人： G. Robert Gray ,  Arun Malhotra

发明人： G. Robert Gray ,  Arun Malhotra

IPC分类号： G11B5/31 ,  G11B5/147 ,  G11B5/187

CPC分类号： G11B5/3106 ,  G11B5/3183

摘要： A thin film magnetic head is provided in which a magnetic yoke assembly is built up, layer by layer, atop a substrate using semiconductor thin film techniques. A lower yoke assembly is first fabricated including a lower magnetic layer situated on the substrate and first and second side poles built up vertically from the ends of the lower magnetic layer. A coil structure is situated about one of the side poles and is separated therefrom by planar insulative layers in which the coil structure is disposed. An insulative pedestal surrounded by a frame is formed at the top of the lower yoke assembly and extends above the uppermost lateral plane of the yoke assembly. A diamond-like carbon (DLC) wear layer is deposited atop the pedestal. A pole well is excavated in the DLC layer so as to expose the first and second side poles therebelow. A first magnetic pole including a gap end is plated in the pole well at the top of the first side pole and extending toward the second side pole. A DLC gap region is deposited in the pole well at the gap end of the first magnetic pole. A second magnetic pole is then plated in the pole well between the second side pole and the DLC gap region. The upper surface of the head is machined to form a head surface which contacts or which nearly contacts the surface of a magnetic media.

摘要翻译： 提供一种薄膜磁头，其中使用半导体薄膜技术逐层地在基板顶上构建磁轭组件。 首先制造下轭组件，其包括位于衬底上的下磁层和从下磁层的端部垂直构成的第一和第二侧极。 线圈结构围绕一个侧极位于其中，并且通过设置线圈结构的平面绝缘层与其分离。 在框架的顶部形成有由框架包围的绝缘基座，并且在轭组件的最上侧的横向平面上方延伸。 钻石状碳（DLC）耐磨层沉积在基座顶部。 在DLC层中挖出极井，以暴露其下的第一和第二侧极。 包括间隙端的第一磁极被电镀在第一侧极的顶部的极孔中并且朝向第二侧极延伸。 DLC间隙区域沉积在第一磁极的间隙端的极孔中。 然后将第二磁极电镀在第二侧极和DLC间隙区域之间的极井中。 头部的上表面被加工成形成与磁性介质的表面接触或几乎接触的头表面。

公开(公告)号：US5544774A

公开(公告)日：1996-08-13

申请号：US296389

申请日：1994-08-26

申请人： G. Robert Gray

发明人： G. Robert Gray

IPC分类号： G11B5/23 ,  G11B5/235 ,  G11B5/31 ,  G11B5/48 ,  B44C1/22

CPC分类号： G11B5/3106 ,  G11B5/3103 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3133 ,  G11B5/3146 ,  G11B5/3163 ,  G11B5/3183 ,  G11B5/488 ,  G11B5/232 ,  G11B5/235 ,  G11B5/3113 ,  G11B5/4893

摘要： A method for fabricating a thin film magnetic head is provided in which a magnetic yoke assembly is built up, layer by layer, atop a substrate using semiconductor thin film techniques. The lower yoke assembly is first formed and includes a lower magnetic layer situated on the substrate and first and second side poles built up vertically from the ends of the lower magnetic layer. An insulative pedestal surrounded by a frame is formed at the top of the lower yoke assembly and extends above the uppermost lateral plane of the yoke assembly. First and second pole pieces are plated on the first and second side poles through openings in the pedestal. A diamond-like carbon (DLC) protective wear layer is deposited atop the pedestal and pole pieces. The wear layer and pole pieces are machined to form the upper head surface. The magnetic pole pieces recede below the surface of the wear layer during machining. The wear layer is then plasma etched until the wear layer and the pole pieces are in substantially the same plane. In this manner, the head is provided with wear protection and at the same time the pole pieces are so close to the magnetic recording media that the reading and writing of data are enhanced.

摘要翻译： 提供了一种制造薄膜磁头的方法，其中使用半导体薄膜技术在基板顶部上逐层地构建磁轭组件。 首先形成下轭组件，并且包括位于衬底上的下磁层和从下磁层的端部垂直构成的第一和第二侧极。 在框架的顶部形成有由框架包围的绝缘基座，并且在轭组件的最上侧的横向平面上方延伸。 第一和第二极片通过基座中的开口电镀在第一和第二侧极上。 钻石状碳（DLC）防护层沉积在基座和极片的顶部。 加工磨损层和极片以形成上头表面。 在加工过程中，磁极片在磨损层的表面下方后退。 然后将耐磨层等离子体蚀刻直到耐磨层和极片处于基本相同的平面内。 以这种方式，头部设置有磨损保护，并且同时磁极件非常接近磁记录介质，从而增强了数据的读取和写入。

公开(公告)号：US5815909A

公开(公告)日：1998-10-06

申请号：US702734

申请日：1996-08-23

申请人： G. Robert Gray

发明人： G. Robert Gray

IPC分类号： G11B5/31 ,  G11B5/48 ,  G11B5/127

CPC分类号： G11B5/488 ,  G11B5/3103 ,  G11B5/3106 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3133 ,  G11B5/3146 ,  G11B5/3163 ,  G11B5/3183 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052 ,  Y10T29/49064

摘要： A method is provided for fabricating a thin film magnetic head including a plurality of layered components. One or more vias are formed through an electrically insulative substrate which includes first and second opposed major surfaces. The via includes an interior side surface. The via is filled with electrically conductive material which is situated in contact with the interior side surface of the via. A via connective member is thus formed which extends between the first and second surfaces of the substrate. A protective via cap is formed atop the via connective member to protect the via connective member from subsequent etching operations. A thin film head is formed atop the first surface of the substrate by building up components of the head layer by layer. This forming a thin film head step includes the step of forming a coil for exciting the head by etching, with an etchant, portions of a layer of electrically conductive material within the head. The via protective cap is fabricated from a material which is substantially resistant to etching by the etchant. In this manner the via conductive member is shielded from the potentially deleterious effects of etching. The via connective member typically couples the coil to circuitry external to the thin film head.

摘要翻译： 提供了一种用于制造包括多个分层部件的薄膜磁头的方法。 通过包括第一和第二相对的主表面的电绝缘衬底形成一个或多个通孔。 通孔包括内侧表面。 通孔填充有导电材料，导电材料与通孔的内侧表面接触。 因此形成了在基板的第一和第二表面之间延伸的通孔连接构件。 在通孔连接构件顶部形成保护通孔，以保护通孔连接构件免于后续蚀刻操作。 通过逐层地形成头部的部件，在基板的第一表面的上方形成薄膜头。 形成薄膜头步骤的步骤包括通过蚀刻来形成用于激发头部的线圈的步骤，其中蚀刻剂是头部内的一层导电材料的部分。 通孔保护帽由基本上耐腐蚀剂蚀刻的材料制成。 以这种方式，通孔导电构件被屏蔽以免受蚀刻的潜在有害影响。 通孔连接构件通常将线圈耦合到薄膜头外部的电路。

公开(公告)号：US5748417A

公开(公告)日：1998-05-05

申请号：US641345

申请日：1996-05-01

申请人： Arun Malhotra ,  Jane Ang ,  G. Robert Gray ,  James Watterston

发明人： Arun Malhotra ,  Jane Ang ,  G. Robert Gray ,  James Watterston

IPC分类号： G11B5/23 ,  G11B5/235 ,  G11B5/31 ,  G11B5/48 ,  G11B5/147

CPC分类号： G11B5/3133 ,  G11B5/3103 ,  G11B5/3106 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3146 ,  G11B5/3163 ,  G11B5/3183 ,  G11B5/488 ,  G11B5/232 ,  G11B5/235 ,  G11B5/3113 ,  G11B5/4893

摘要： A thin film magnetic head is fabricated on a substrate by depositing a seed layer on the substrate. This seed layer is advantageously used as a common seed for a plurality of magnetic head related structures which are built-up on the substrate. A lower magnetic layer is plated on the substrate in an opening provided in an insulative layer which is deposited on the substrate. The aforementioned seed layer is used as the seed for this lower magnetic layer. A plurality of magnetic layers are plated at one end of the lower magnetic layer to build-up and form a first side pole by using the above seed layer as a seed. Another plurality of magnetic layers are plated at the other end of the lower magnetic layer to build-up and form a second side pole by using the same seed layer as a seed. The first and second side poles thus formed include upper and lower ends, the lower ends being plated to the ends of the lower magnetic layer. A first upper pole is plated to the upper end of the first side pole. The first upper pole includes a gap end facing the second side pole. A gap region of nonmagnetic material is deposited adjacent the gap end of the first upper pole. A second upper pole is plated to the upper end of the second side pole and includes a gap end adjacent the gap region.

摘要翻译： 通过在衬底上沉积种子层，在衬底上制造薄膜磁头。 该种子层有利地用作在基底上积累的多个磁头相关结构的常见种子。 在设置在沉积在基板上的绝缘层中的开口中，在基板上电镀下层磁性层。 上述种子层用作该下层磁性层的种子。 多个磁性层通过使用上述种子层作为种子在下部磁性层的一端进行电镀以形成第一侧极。 另外多个磁性层在下部磁性层的另一端被电镀，以通过使用与种子相同的种子层来形成第二侧极。 这样形成的第一和第二侧极包括上端和下端，下端被电镀到下磁性层的端部。 第一上极被电镀到第一侧极的上端。 第一上极包括面向第二侧极的间隙端。 非磁性材料的间隙区域邻近第一上极的间隙端部沉积。 第二上极被电镀到第二侧极的上端，并且包括邻近间隙区的间隙端。

公开(公告)号：US5737825A

公开(公告)日：1998-04-14

申请号：US632823

申请日：1996-04-16

申请人： G. Robert Gray ,  Arun Malhotra

发明人： G. Robert Gray ,  Arun Malhotra

IPC分类号： G11B5/23 ,  G11B5/235 ,  G11B5/31 ,  G11B5/48 ,  G11B5/42

CPC分类号： G11B5/3183 ,  G11B5/3103 ,  G11B5/3106 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3133 ,  G11B5/3146 ,  G11B5/3163 ,  G11B5/488 ,  G11B5/232 ,  G11B5/235 ,  G11B5/3113 ,  G11B5/4893 ,  Y10T29/49044 ,  Y10T29/49046

摘要： A thin film magnetic head is provided in which a magnetic yoke assembly is built up, layer by layer, atop a substrate using semiconductor thin film techniques. A lower yoke assembly is first fabricated including a lower magnetic layer situated on the substrate and first and second side poles built up vertically from the ends of the lower magnetic layer. An insulative pedestal surrounded by a frame is formed at the top of the lower yoke assembly and extends above the uppermost lateral plane of the yoke assembly. A diamond-like carbon (DLC) wear layer is deposited atop the pedestal. First and second pole wells are excavated in the DLC layer so as to expose the first and second side poles therebelow and to form a DLC gap region between the first and second side poles. First and second magnetic poles are then formed in the first and second pole wells, respectively.

摘要翻译： 提供一种薄膜磁头，其中使用半导体薄膜技术逐层地在基板顶上构建磁轭组件。 首先制造下轭组件，其包括位于衬底上的下磁层和从下磁层的端部垂直构成的第一和第二侧极。 在框架的顶部形成有由框架包围的绝缘基座，并且在轭组件的最上侧的横向平面上方延伸。 钻石状碳（DLC）耐磨层沉积在基座顶部。 第一和第二极孔在DLC层中被挖掘，以暴露第一和第二侧极，并且在第一和第二侧极之间形成DLC间隙区。 然后分别在第一和第二极孔中形成第一和第二磁极。

公开(公告)号：US5684660A

公开(公告)日：1997-11-04

申请号：US438230

申请日：1995-05-09

申请人： G. Robert Gray ,  Arun Malhotra

发明人： G. Robert Gray ,  Arun Malhotra

IPC分类号： G11B5/31 ,  G11B5/53 ,  G11B5/147

CPC分类号： G11B5/313 ,  G11B5/3106 ,  G11B5/3176 ,  G11B5/3183 ,  G11B5/53

摘要： A thin film head is disclosed which is miniaturized to fit within a reduced size window or circumferential slot in a rotary head assembly. The thin film head and window or slot can be made so small that undesired tape cupping into the window or slot is significantly reduced. The thin film head includes a substrate of electrically insulative material. In one embodiment, a substantially helical thin film coil structure is situated atop the substrate. A magnetic core extends through the coil structure so that the coil structure can magnetically excite the core. The core includes first and second side pole members. A protective cocoon of electrically insulative material covers the coil structure and the core except for ends of the first and second side pole members. The cocoon includes an upper planar surface which exposes the ends of the first and second side pole members to permit coupling thereto by a magnetic gap structure. An elevated thin film magnetic gap structure is positioned atop the coil structure and the upper planar surface of the protective cocoon. Protection from ambient conditions is thus provided to both the coil structure and the magnetic core while simultaneously enhancing the planarity of the layers above the planar upper surface of the protective cocoon.

摘要翻译： 公开了一种薄膜头，其小型化以配合在旋转头组件中的减小尺寸的窗口或周向槽中。 薄膜头部和窗口或狭槽可以制成如此小，从而显着地减少了对窗口或狭槽的不期望的磁带拔罐。 薄膜头包括电绝缘材料的基片。 在一个实施例中，基本上螺旋形的薄膜线圈结构位于衬底顶部。 磁芯延伸穿过线圈结构，使得线圈结构可以磁激励磁芯。 芯部包括第一和第二侧面杆部件。 电绝缘材料的保护性茧覆盖除了第一和第二侧极构件的端部之外的线圈结构和芯。 茧包括上平坦表面，其暴露第一和第二侧极构件的端部以允许通过磁隙结构与其连接。 升高的薄膜磁隙结构位于线圈结构顶部和保护性茧的上平面上。 因此，能够将保护环境的环境提供给线圈结构和磁芯，同时提高保护性茧的平面上表面上方的层的平面度。

公开(公告)号：US5621594A

公开(公告)日：1997-04-15

申请号：US390470

申请日：1995-02-17

申请人： G. Robert Gray ,  Arun Malhotra

发明人： G. Robert Gray ,  Arun Malhotra

IPC分类号： G11B5/31 ,  G11B5/105 ,  G11B5/127 ,  G11B5/17 ,  H01F41/04

CPC分类号： G11B5/17 ,  G11B5/105 ,  G11B5/127 ,  H01F41/046 ,  G11B5/313

摘要： A thin film helical conductor coil assembly includes an electrically-nonconducting ceramic substrate having a substantially planar surface and separated first and second magnetic elements which mutually bound a volume of the ceramic substrate. The thin film conductor coil assembly also includes a thin film magnetic core, which magnetically connects the first magnetic element to the second magnetic element. The thin film magnetic core, which overlies the substantially planar surface of the ceramic substrate, is constructed from a compliant electroplated magnetic material. The thin film conductor coil assembly further includes an electroplated thin film helical coil which traverses about the thin film magnetic core and forms a conductive path from a first terminal to a second terminal.

摘要翻译： 薄膜螺旋导体线圈组件包括具有基本平坦的表面的电非导体陶瓷衬底，并且分离的第一和第二磁性元件相互结合陶瓷衬底的体积。 薄膜导体线圈组件还包括将第一磁性元件与第二磁性元件磁连接的薄膜磁芯。 覆盖在陶瓷基板的基本上平坦的表面上的薄膜磁芯由柔性电镀的磁性材料构成。 薄膜导体线圈组件还包括电镀薄膜螺旋线圈，其绕薄膜磁芯穿过并形成从第一端子到第二端子的导电路径。