公开(公告)号：US4935700A

公开(公告)日：1990-06-19

申请号：US311159

申请日：1989-03-16

申请人： Joseph L. Garbini ,  Laurence J. Albrecht ,  Jens E. Jorgensen ,  Georg F. Mauer

发明人： Joseph L. Garbini ,  Laurence J. Albrecht ,  Jens E. Jorgensen ,  Georg F. Mauer

IPC分类号： G01B7/02 ,  G01B7/12 ,  G01B7/28

CPC分类号： G01B7/023 ,  G01B7/12 ,  G01B7/28

摘要： A fringe field, capacitive distance sensor for measuring the distance between a probe and the surface of the conductive body. The sensor comprises a conductive plate element mounted by the probe, the thickness of the plate element being substantially less than the height and width of the plate element. The plate element is positioned adjacent to and normal to the body surface, and the fringe field capacitance between the plate element and the body is measured, to thereby determine the distance between the probe and the body surface. The probe may be in contact with and scanned across the body surface, to provide surface profile measurements. A probe including a plurality of plate elements may be positioned inside an opening such as a hole, to measure the geometry of the hole. By maintaining the hole probe adjacent one electrode in contact with the hole wall, both profile and geometry measurements may be made. A noncontacting probe including one or more plate elements may be used to measure surface topography.

摘要翻译： 用于测量探针与导电体表面之间的距离的边缘场，电容距离传感器。 传感器包括由探针安装的导电板元件，板元件的厚度基本上小于板元件的高度和宽度。 板元件邻近并垂直于身体表面定位，并且测量板元件和身体之间的边缘场电容，从而确定探针与身体表面之间的距离。 探针可以与身体表面接触并扫描，以提供表面轮廓测量。 包括多个板元件的探针可以定位在诸如孔的开口内部，以测量孔的几何形状。 通过将孔探针保持在与孔壁接触的一个电极附近，可以进行轮廓和几何测量。 包括一个或多个板元件的非接触式探针可用于测量表面形貌。