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公开(公告)号:US20070019310A1
公开(公告)日:2007-01-25
申请号:US10563701
申请日:2004-07-08
申请人: Andreas Seifert , Frank Melzer , Andreas Heisler , Heinz Mann , Gerhard Romeyn
发明人: Andreas Seifert , Frank Melzer , Andreas Heisler , Heinz Mann , Gerhard Romeyn
IPC分类号: G02B5/08
CPC分类号: G03F7/70075 , G02B5/08 , G02B5/09 , G03F7/70141 , G03F7/702 , G03F7/70825 , G21K2201/06
摘要: In a method for producing mirror facets (1) for facet mirrors in illuminating devices or projection exposure machines in microlithography by using radiation in the extreme ultraviolet range, individual tilting angles are recessed into an optical surface (2) of the mirror facet (1), preferably a surface with tilting angles relative to a reference surface of the mirror facet (1) is machined into or on said optical surface.
摘要翻译: 在通过使用在极紫外线范围内的辐射的微照相中的用于在照明装置或投影曝光机中制造用于刻面镜的镜面(1)的方法中,各个倾斜角度凹入到镜面(1)的光学表面(2)中, 优选地,相对于镜面(1)的参考表面具有倾斜角度的表面被加工到所述光学表面中或所述光学表面上。