公开(公告)号：US07289863B2

公开(公告)日：2007-10-30

申请号：US11206675

申请日：2005-08-18

申请人： Joseph D. Arruda ,  Kathleen D. Keay ,  Glen F. R. Gilchrist

发明人： Joseph D. Arruda ,  Kathleen D. Keay ,  Glen F. R. Gilchrist

IPC分类号： G06F14/00 ,  G01M3/32 ,  G01M3/04

CPC分类号： G01M3/3236 ,  H01J2237/18

摘要： In one embodiment according to the invention, there is disclosed a method of identifying a source of a vacuum quality problem in a vacuum environment associated with a tool. The method comprises gathering and storing vacuum environment data; identifying an anomaly within the vacuum environment; determining a tool component operating state when the anomaly likely occurred; and determining the source of the vacuum quality problem based on a state of the vacuum environment when the anomaly likely occurred and the tool component operating state when the anomaly likely occurred.

摘要翻译： 在根据本发明的一个实施例中，公开了一种在与工具相关联的真空环境中识别真空质量问题源的方法。 该方法包括收集和存储真空环境数据; 识别真空环境中的异常情况; 当异常可能发生时确定工具组件的运行状态; 以及当异常可能发生时基于真空环境的状态以及当异常可能发生时的工具部件操作状态来确定真空质量问题的来源。