公开(公告)号：US06942738B1

公开(公告)日：2005-09-13

申请号：US09612009

申请日：2000-07-07

申请人： Gordon Ray Nelson ,  Daniel P. Bexten ,  Jeffry A. Davis

发明人： Gordon Ray Nelson ,  Daniel P. Bexten ,  Jeffry A. Davis

IPC分类号： H01L21/677 ,  H01L21/687 ,  B08B3/02

CPC分类号： H01L21/68707 ,  H01L21/67754 ,  H01L21/67757 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  H01L21/67781 ,  Y10S414/137

摘要： An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are located in the process bay. A process robot moves between the indexer bay and process bay to carry semi-conductor wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Semiconductor wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.

摘要翻译： 自动半导体处理系统具有与清洁空气封闭体内的工艺间隔垂直对准的分度器托架。 索引器托架中的索引器为进行中的半导体晶片提供放样或存储。 过程室位于过程托架中。 过程机器人在分度器托架和过程间隔之间移动，以将半导体晶片运送到处理室和从处理室运送。 过程机器人具有可沿着升降轨道垂直移动的机器人手臂。 半导体晶片从机器人手臂偏移，以更好地避免污染。 自动化系统紧凑，需要较少的洁净室空间。

公开(公告)号：US07278813B2

公开(公告)日：2007-10-09

申请号：US10334688

申请日：2002-12-30

申请人： Jeffry A. Davis ,  Gordon Ray Nelson ,  Daniel P. Bexten

发明人： Jeffry A. Davis ,  Gordon Ray Nelson ,  Daniel P. Bexten

IPC分类号： B65G49/07

CPC分类号： H01L21/67775 ,  H01L21/67769 ,  H01L21/67781 ,  H01L21/68707 ,  Y10S414/137

摘要： An automated processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress wafers or articles. Process chambers are located in the process bay. A transfer robot moves wafers from a pod unsealed at a docking station into a carrier at a transfer station. The carrier has tapered or stepped outside surfaces engaging corresponding inside surfaces on a rotor within a process chamber. A process robot moves between the indexer bay and process bay to carry wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.

摘要翻译： 自动处理系统具有与清洁空气封闭体内的处理室垂直对准的分度器托架。 索引器托架中的索引器提供放置或存储用于正在进行的晶片或物品。 过程室位于过程托架中。 传送机器人将来自对接站的密封件中的晶片从传送站移动到载体中。 载体具有与处理室内的转子上的相应内表面接合的锥形或阶梯状的外表面。 过程机器人在分度器托架和过程间隔之间移动以将晶片运送到处理室和从处理室运送晶片。 过程机器人具有可沿着升降轨道垂直移动的机器人手臂。 晶片从机器人手臂偏移，以更好地避免污染。 自动化系统紧凑，需要较少的洁净室空间。

公开(公告)号：US06723174B2

公开(公告)日：2004-04-20

申请号：US10163837

申请日：2002-06-05

申请人： Gordon Ray Nelson ,  Daniel P. Bexten ,  Jeffry A. Davis

发明人： Gordon Ray Nelson ,  Daniel P. Bexten ,  Jeffry A. Davis

IPC分类号： B08B302

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  H01L21/67754 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  H01L21/67781 ,  Y10S414/137

摘要： An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are located in the process bay: A process robot moves between the indexer bay and process bay to carry semi-conductor wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Semiconductor wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.

摘要翻译： 自动半导体处理系统具有与清洁空气封闭体内的工艺间隔垂直对准的分度器托架。 索引器托架中的索引器为进行中的半导体晶片提供放样或存储。 过程室位于过程室中：过程机器人在分度器托架和过程间隔之间移动，以将半导体晶片运送到过程室和从处理室运送。 过程机器人具有可沿着升降轨道垂直移动的机器人手臂。 半导体晶片从机器人手臂偏移，以更好地避免污染。 自动化系统紧凑，需要较少的洁净室空间。