Automated probe card planarization and alignment methods and tools
    2.
    发明申请
    Automated probe card planarization and alignment methods and tools 有权
    自动探针卡平面化和对准方法和工具

    公开(公告)号:US20070216431A1

    公开(公告)日:2007-09-20

    申请号:US11703891

    申请日:2007-02-07

    IPC分类号: G01R31/02

    CPC分类号: G01R31/2891 G01R1/07342

    摘要: A method and apparatus for performing automated alignment of probes of a probe card is provided. The desired horizontal location for a probe is compared with the actual horizontal position for the probe to determine a horizontal correction distance and a horizontal correction direction to correct a horizontal alignment for the probe. A first tool automatically corrects the horizontal alignment for the probe based on the horizontal correction distance and the horizontal correction direction. Upon determining that an actual vertical position of the probe is closer to the probe card than a desired vertical position, a second tool automatically changes the actual vertical position of the probe to the desired vertical position. Upon determining that the actual vertical position of the probe is farther from the probe card than the desired vertical position, a third tool automatically changes the actual vertical position of the probe to the desired vertical position.

    摘要翻译: 提供了用于执行探针卡的探针的自动对准的方法和装置。 将探针的期望水平位置与探针的实际水平位置进行比较,以确定水平校正距离和水平校正方向以校正探针的水平对准。 第一个工具根据水平校正距离和水平校正方向自动校正探头的水平对准。 当确定探头的实际垂直位置比期望的垂直位置更靠近探针卡时,第二工具自动将探头的实际垂直位置改变到期望的垂直位置。 当确定探针的实际垂直位置比探针卡比期望的垂直位置更远时,第三工具自动将探头的实际垂直位置改变到期望的垂直位置。