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公开(公告)号：US5674368A
公开(公告)日：1997-10-07
申请号：US250500
申请日：1994-05-27
申请人： Hajime Hashimoto , Kazuo Kubota , Daisuke Inoue , Syuichi Nogawa
发明人： Hajime Hashimoto , Kazuo Kubota , Daisuke Inoue , Syuichi Nogawa
CPC分类号： C23C14/50 , C23C14/566 , C23C14/568
摘要： A film forming apparatus includes a film forming chamber in which a film is formed on a substrate at a film forming position, a plurality of load lock chambers provided on the film forming chamber through gate valves respectively, a plurality of pivots provided in the film forming chamber correspondingly to the respective load lock chambers, and carrying arms supported by the pivots respectively so as to move the substrate from any one of the load lock chambers to the film forming position and contrariwise from the film forming position to any one of the load lock chambers.
摘要翻译： 一种成膜装置包括：成膜室，其中在成膜位置的基板上形成膜，多个负载锁定室分别通过闸阀设置在成膜室上，多个枢轴设置在成膜 分别对应于各个负载锁定室，以及分别由枢轴支撑的支撑臂，以便使基板从任何一个装载锁定室移动到胶片形成位置，并从胶片形成位置相反地移动到任何一个装载锁 房间。
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公开(公告)号：US5482607A
公开(公告)日：1996-01-09
申请号：US123225
申请日：1993-09-20
申请人： Hajime Hashimoto , Kazuo Kubota , Daisuke Inoue , Syuichi Nogawa
发明人： Hajime Hashimoto , Kazuo Kubota , Daisuke Inoue , Syuichi Nogawa
CPC分类号： C23C14/50 , C23C14/566 , C23C14/568
摘要： A film forming apparatus includes a film forming chamber in which a film is formed on a substrate at a film forming position, a plurality of load lock chambers provided on the film forming chamber through gate valves respectively, a plurality of pivots provided in the film forming chamber correspondingly to the respective load lock chambers, and carrying arms supported by the pivots respectively so as to move the substrate from any one of the load lock chambers to the film forming position and contrariwise from the film forming position to any one of the load lock chambers.
摘要翻译： 一种成膜装置包括：成膜室，其中在成膜位置的基板上形成膜，分别通过闸阀设置在成膜室上的多个负载锁定室，设置在膜形成中的多个枢轴 分别对应于各个负载锁定室，以及分别由枢轴支撑的支撑臂，以便使基板从任何一个装载锁定室移动到胶片形成位置，并从胶片形成位置相反地移动到任何一个装载锁 房间。
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