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公开(公告)号：US10209180B2
公开(公告)日：2019-02-19
申请号：US15577685
申请日：2016-06-27
IPC分类号： G01N21/35 , G01N21/01 , G02B6/136 , G01N21/3504
摘要： A sensor device comprising a planar substrate defining a substrate plane and a waveguide for guiding an electromagnetic wave. The waveguide extends in a length direction in a waveguide plane parallel to the substrate plane and has a width and a height, wherein the width to height ratio is more than 5. The height of the waveguide is less than the wavelength of the electromagnetic wave. The waveguide is supported on the substrate by a support structure extending from the substrate to the waveguide, along the length direction of the waveguide, having a width which is smaller than the width of the waveguide. The invention further relates to a method of detecting a component in gas and a method of fabricating a sensor device.
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公开(公告)号：US20180164208A1
公开(公告)日：2018-06-14
申请号：US15577685
申请日：2016-06-27
IPC分类号： G01N21/3504 , G02B6/136 , G01N21/01
CPC分类号： G01N21/3504 , G01N21/01 , G02B6/136
摘要： The invention relates to a sensor device (1) comprising a planar substrate (3) defining a substrate plane (4) and a waveguide (2) for guiding an electromagnetic wave. The waveguide (2) extends in a length direction in a waveguide plane (4′) parallel to the substrate plane (4) and has a width (W, w) and a height (h) wherein the width (W, w) to height (h) ratio is more than 5. The height (h) of the waveguide (2) is less than the wavelength of the electromagnetic wave. The waveguide (2) is supported on the substrate (3) by a support structure (5) extending from the substrate (3) to the waveguide (2), along the length direction of the waveguide (2), having a width (Ws) which is smaller than the width (W, w) of the waveguide (2). The invention further relates to a method of detecting a component in gas and a method of fabricating a sensor device (1).
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